Ion-implanted surface-acoustic-wave guides on lithium niobate

Journal Article · Wed Mar 01 00:00:00 EST 1978 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.90018· OSTI ID:5142355

Hartemann, P; Cauvard, P; Desbois, D

Surface-acoustic-wave guides have been obtained by ion-implanting narrow channels on lithium niobate substrates. Guides of different widths have been tested at 150 MHz. Two doses of helium ions at 100 keV have been used. The acoustic power distribution profiles along a guide length close to 21 mm were determined by optical probing. Air-gap silicon convolvers have been implemented with this kind of guide. An external figure of merit equal to -49 dBm has been measured, whereas without guidance the external figure of merit is only close to -61 dBm for the same transducer pattern.

• Research Organization: THOMSON-CSF, Laboratoire Central de Recherches, Domaine de Corbeville: 91401 Orsay, France
• OSTI ID: 5142355
• Journal Information: Appl. Phys. Lett.; (United States), Vol. 32:5
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
LITHIUM COMPOUNDS
PHYSICAL RADIATION EFFECTS
NIOBATES
DOSE-RESPONSE RELATIONSHIPS
HELIUM IONS
ION IMPLANTATION
KEV RANGE 10-100
SOUND WAVES
WAVEGUIDES
ALKALI METAL COMPOUNDS
ENERGY RANGE
KEV RANGE
NIOBIUM COMPOUNDS
OXYGEN COMPOUNDS
RADIATION EFFECTS
TRANSITION ELEMENT COMPOUNDS
360605* - Materials- Radiation Effects