Method for producing high quality thin layer films on substrates
Patent
·
OSTI ID:5113439
A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate. 4 figures.
- DOE Contract Number:
- AC02-76CH00016
- Assignee:
- Associated Universities, Inc., Washington, DC (United States)
- Patent Number(s):
- US 5306530; A
- Application Number:
- PPN: US 7-980496
- OSTI ID:
- 5113439
- Country of Publication:
- United States
- Language:
- English
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