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Title: Method for producing high quality thin layer films on substrates

Abstract

A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate. 4 figures.

Inventors:
; ;
Publication Date:
OSTI Identifier:
5113439
Patent Number(s):
US 5306530; A
Application Number:
PPN: US 7-980496
Assignee:
Associated Universities, Inc., Washington, DC (United States) PTO; EDB-94-076093
DOE Contract Number:
AC02-76CH00016
Resource Type:
Patent
Resource Relation:
Patent File Date: 23 Nov 1992
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; INORGANIC COMPOUNDS; CHEMICAL COATING; THIN FILMS; CHARGED PARTICLES; PHOTON BEAMS; PRECURSOR; BEAMS; DEPOSITION; FILMS; SURFACE COATING; 360601* - Other Materials- Preparation & Manufacture

Citation Formats

Strongin, M., Ruckman, M., and Strongin, D. Method for producing high quality thin layer films on substrates. United States: N. p., 1994. Web.
Strongin, M., Ruckman, M., & Strongin, D. Method for producing high quality thin layer films on substrates. United States.
Strongin, M., Ruckman, M., and Strongin, D. 1994. "Method for producing high quality thin layer films on substrates". United States. doi:.
@article{osti_5113439,
title = {Method for producing high quality thin layer films on substrates},
author = {Strongin, M. and Ruckman, M. and Strongin, D.},
abstractNote = {A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate. 4 figures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = 1994,
month = 4
}
  • A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.
  • A method for providing an oxide film of a material on the surface of a substrate using a reactive deposition of the material onto the substrate surface in the presence of a solid or liquid layer of an oxidizing gas. The oxidizing gas is provided on the substrate surface in an amount sufficient to dissipate the latent heat of condensation occurring during deposition as well as creating a favorable oxidizing environment for the material.
  • A method is described for providing an oxide film of a material on the surface of a substrate using a reactive deposition of the material onto the substrate surface in the presence of a solid or liquid layer of an oxidizing gas. The oxidizing gas is provided on the substrate surface in an amount sufficient to dissipate the latent heat of condensation occurring during deposition as well as creating a favorable oxidizing environment for the material. 4 figures.
  • The invention pertains to the production of ceramic substrates used in the manufacture of thin-film photovoltaic cells used for directly converting solar energy to electrical energy. Elongated ribbon-like sheets of substrate precursor containing a mixture of ceramic particulates, a binder, and a plasticizer are formed and then while green provided with a mechanically textured surface region used for supporting the thin film semiconductor of the photovoltaic cell when the sheets of the substrate precursor are subsequently cut into substrate-sized shapes and then sintered. The textured surface pattern on the substrate provides enhanced light trapping and collection for substantially increasing the,more » solar energy conversion efficiency of thin-film photovoltaic cells. 4 figs.« less
  • The invention pertains to the production of ceramic substrates used in the manufacture of thin-film photovoltaic cells used for directly converting solar energy to electrical energy. Elongated ribbon-like sheets of substrate precursor containing a mixture of ceramic particulates, a binder, and a plasticizer are formed and then while green provided with a mechanically textured surface region used for supporting the thin film semiconductor of the photovoltaic cell when the sheets of the substrate precursor are subsequently cut into substrate-sized shapes and then sintered. The textured surface pattern on the substrate provides enhanced light trapping and collection for substantially increasing themore » solar energy conversion efficiency of thin-film photovoltaic cells.« less