Computer-controlled ion beam sputter-deposition of superconducting oxide films. Technical report, 1 July 1988-30 June 1989

Technical Report · Fri Jun 30 00:00:00 EDT 1989

OSTI ID:5042230

Auciello, O H; Kingon, A I; Davis, R F

The goals of this project are: (1) the development of a new method for the fabrication of superconducting oxide thin films, viz computer-controlled ion beam sputter deposition; and (2) the fabrication of YBa{sub 2}Cu{sub 3}O(7-delta) thin films and devices using this method. In the early stage of the project it was demonstrated that the use of complex multicomponent sputter targets such as ceramic YBa{sub 2}Cu{sub 3}O(7-delta) present significant problems for compositional control. The new computer-controlled ion-beam sputter-deposition system was developed. The key features include: (1) a rotatable target holder assembly, which serves to position elemental targets under the ion beam in a rapid sequence, (2) a primary ion beam to produce a sputtered flux from the targets, (3) a secondary oxygen beam (ionic, atomic, or reactive oxygen (ozone)) to oxygenate the film and lower the required deposition temperature, (4) complete computer interfacing to provide real-time feedback on the thickness of the depositing species and control of the above items. In terms of the superconductor device objectives, the system is designed to allow for low-temperature deposition for integrated devices, compositional control and flexibility, and for scaling to a commercial system. The capability of the system for controlled sequential deposition of layered structures is fundamental for the production of heterostructures and sandwich junctions (superconductor-insulator-superconductor and superconductor-normal-superconductor). This is demanding due to the short coherence lengths in the oxide superconductors.

• Research Organization: North Carolina State Univ., Raleigh, NC (USA). Dept. of Materials Science and Engineering
• OSTI ID: 5042230
• Report Number(s): AD-A-213921/0/XAB
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CUPRATES
SUPERCONDUCTING FILMS
FABRICATION
BARIUM COMPOUNDS
CERAMICS
CONTROL
COPPER COMPOUNDS
DEPOSITION
FEEDBACK
FILMS
ION BEAMS
JUNCTIONS
LAYERS
OXIDES
OXYGEN
PRODUCTION
PROGRESS REPORT
SPUTTERING
SUPERCONDUCTORS
THIN FILMS
YTTRIUM COMPOUNDS
ALKALINE EARTH METAL COMPOUNDS
BEAMS
CHALCOGENIDES
DOCUMENT TYPES
ELEMENTS
NONMETALS
OXYGEN COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
426001* - Engineering- Superconducting Devices & Circuits- (1990-)