Large-area surface discharge UV light source for materials processing applications
Conference
·
OSTI ID:503511
Performance of 6 inches x 6 inches surface discharge that give integrated light intensities greater than 400 mJ/cm{sup 2} is reported here. Light uniformity on the surface of high density alumina dielectric has been measured to show better than 5% across the entire discharge area. Detailed spectroscopic content of these discharges in different gases and gas mixtures are presented from 160nm to 735 nm region.
- Research Organization:
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 503511
- Report Number(s):
- LA-UR-97-520; CONF-970231-26; ON: DE97004789; TRN: 97:004470
- Resource Relation:
- Conference: SPIE international symposium, San Jose, CA (United States), 8-14 Feb 1997; Other Information: PBD: 1997
- Country of Publication:
- United States
- Language:
- English
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