Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
A microengine uses two synchronized linear actuators as a power source and converts oscillatory motion from the actuators into rotational motion via direct linkage connection to an output gear or wheel. The microengine provides output in the form of a continuously rotating output gear that is capable of delivering drive torque to a micromechanism. The microengine can be operated at varying speeds and its motion can be reversed. Linear actuators are synchronized in order to provide linear oscillatory motion to the linkage means in the X and Y directions according to a desired position, rotational direction and speed of said mechanical output means. The output gear has gear teeth on its outer perimeter for directly contacting a micromechanism requiring mechanical power. The gear is retained by a retaining means which allows said gear to rotate freely. The microengine is microfabricated of polysilicon on one wafer using surface micromachining batch fabrication. 30 figs.
- Research Organization:
- AT&T
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- Patent Number(s):
- US 5,631,514/A/
- Application Number:
- PAN: 8-257,317
- OSTI ID:
- 489108
- Resource Relation:
- Other Information: PBD: 20 May 1997
- Country of Publication:
- United States
- Language:
- English
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