APPARATUS FOR VACUUM DEPOSITION ON A NEGATIVELY BIASED SUBSTRATE.
Patent
·
OSTI ID:4826481
- Research Organization:
- Originating Research Org. not identified
- NSA Number:
- NSA-23-014101
- Assignee:
- (to United States Atomic Energy Commission).
- Patent Number(s):
- US 3428546 .
- OSTI ID:
- 4826481
- Country of Publication:
- United States
- Language:
- English
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