skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Atomic Force Microscope

Technical Report ·
DOI:https://doi.org/10.2172/476627· OSTI ID:476627

The Atomic Force Microscope (AFM) is a recently developed instrument that has achieved atomic resolution imaging of both conducting and non- conducting surfaces. Because the AFM is in the early stages of development, and because of the difficulty of building the instrument, it is currently in use in fewer than ten laboratories worldwide. It promises to be a valuable tool for obtaining information about engineering surfaces and aiding the .study of precision fabrication processes. This paper gives an overview of AFM technology and presents plans to build an instrument designed to look at engineering surfaces.

Research Organization:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States); North Carolina State Univ., Raleigh, NC (United States)
OSTI ID:
476627
Report Number(s):
LA-SUB-93-81; ON: DE97003578; TRN: 97:002288-0003
Resource Relation:
Other Information: PBD: Dec 1988; Related Information: Is Part Of Precision Engineering Center. 1988 Annual report, Volume VI; Dow, T. [ed.]; Fornaro, R.; Keltie, R.; Paesler, M. [and others]; PB: 367 p.
Country of Publication:
United States
Language:
English

Similar Records

The impact of subcontinuum gas conduction on topography measurement sensitivity using heated atomic force microscope cantilevers
Journal Article · Sat Oct 01 00:00:00 EDT 2005 · Physics of Fluids (1994) · OSTI ID:476627

Limitations on the use of scanning probe microscopy for the measurement of field emission from copper surfaces
Technical Report · Wed Feb 25 00:00:00 EST 2004 · OSTI ID:476627

Micropattern measurement with an atomic force microscope
Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) · OSTI ID:476627