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Title: Dual axis operation of a micromachined rate gyroscope

Abstract

Since micromachining technology has raised the prospect of fabricating high performance sensors without the associated high cost and large size, many researchers have investigated micromachined rate gyroscopes. The vast majority of research has focused on single input axis rate gyroscopes, but this paper presents work on a dual input axis micromachined rate gyroscope. The key to successful simultaneous dual axis operation is the quad symmetry of the circular oscillating rotor design. Untuned gyroscopes with mismatched modes yielded random walk as low as 10{degrees}/{radical}hour with cross sensitivity ranging from 6% to 16%. Mode frequency matching via electrostatic tuning allowed performance better than 2{degrees}/{radical}hour, but at the expense of excessive cross sensitivity.

Authors:
 [1];  [2];  [3]
  1. BSAC, Berkeley, CA (United States)
  2. Univ. California, Berkeley, CA (United States). Dept. of Mechanical Engineering
  3. Sandia National Lab., Albuquerque, NM (United States)
Publication Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
471382
Report Number(s):
SAND-97-0832C; CONF-970646-2
ON: DE97004641; TRN: 97:003073
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: 9. international conference on solid-state sensors and actuators, Chicago, IL (United States), 16-19 Jun 1997; Other Information: PBD: 1997
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; GYROSCOPES; OPERATION; MECHANICAL STRUCTURES; MACHINING

Citation Formats

Juneau, T., Pisano, A.P., and Smith, J.. Dual axis operation of a micromachined rate gyroscope. United States: N. p., 1997. Web.
Juneau, T., Pisano, A.P., & Smith, J.. Dual axis operation of a micromachined rate gyroscope. United States.
Juneau, T., Pisano, A.P., and Smith, J.. Tue . "Dual axis operation of a micromachined rate gyroscope". United States. https://www.osti.gov/servlets/purl/471382.
@article{osti_471382,
title = {Dual axis operation of a micromachined rate gyroscope},
author = {Juneau, T. and Pisano, A.P. and Smith, J.},
abstractNote = {Since micromachining technology has raised the prospect of fabricating high performance sensors without the associated high cost and large size, many researchers have investigated micromachined rate gyroscopes. The vast majority of research has focused on single input axis rate gyroscopes, but this paper presents work on a dual input axis micromachined rate gyroscope. The key to successful simultaneous dual axis operation is the quad symmetry of the circular oscillating rotor design. Untuned gyroscopes with mismatched modes yielded random walk as low as 10{degrees}/{radical}hour with cross sensitivity ranging from 6% to 16%. Mode frequency matching via electrostatic tuning allowed performance better than 2{degrees}/{radical}hour, but at the expense of excessive cross sensitivity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 01 00:00:00 EST 1997},
month = {Tue Apr 01 00:00:00 EST 1997}
}

Conference:
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