Production of a-Si{sub 1{minus}x}C{sub x}:H powders using radiofrequency glow discharges of silane and methane mixtures
- Univ. de Barcelona (Spain). Dept. de Fisica Aplicada i Electronica
a-Si{sub 1{minus}x}C{sub x}:H powders have been produced in radiofrequency glow discharges of SiH{sub 4} and CH{sub 4}. Samples produced in discharges with different gas flow ratios (R = [CH{sub 4}]/[SiH{sub 4}] + [CH{sub 4}], R {approximately} 0.2 to 0.95) were analyzed by several techniques: infrared spectroscopy, transmission electron microscopy and thermal desorption spectrometry of hydrogen. The microstructural properties of the a-Si{sub 1{minus}x}C{sub x}:H powders obtained ranged between those previously reported in silicon particles and those of amorphous carbon particles. As a general rule, the particles, whose diameter ranged between 5 and 400 nm in diameter, showed an amorphous microstructure and high hydrogen content. Infrared spectroscopy showed that the hydrogen was mainly located on the particle surface and in microvoids forming CH{sub i} and/or SiH{sub i} (i = 2,3) groups. The hydrogen was removed from the powder by thermal annealing (< 700 C) under vacuum. Analysis of the a-Si{sub 1{minus}x}C{sub x}:H powders after this thermal treatment revealed new microstructural and optical features.
- Sponsoring Organization:
- Commission of the European Communities, Brussels (Belgium); Comision Interministerial de Ciencia y Tecnologia (Spain); DGICyT (Spain)
- OSTI ID:
- 470903
- Report Number(s):
- CONF-951155-; ISBN 1-55899-313-4; TRN: IM9722%%25
- Resource Relation:
- Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 27 Nov - 1 Dec 1995; Other Information: PBD: 1996; Related Information: Is Part Of Covalent ceramics III -- Science and technology of non-oxides; Hepp, A.F. [ed.] [National Aeronautics and Space Administration, Cleveland, OH (United States). Lewis Research Center]; Kumta, P.N. [ed.] [Carnegie Mellon Univ., Pittsburgh, PA (United States)]; Sullivan, J.J. [ed.] [MKS Instruments, Andover, MA (United States)]; Fischman, G.S. [ed.] [Food and Drug Administration, Rockville, MD (United States)]; Kaloyeros, A.E. [ed.] [Univ. of Albany, NY (United States)]; PB: 499 p.; Materials Research Society symposium proceedings, Volume 410
- Country of Publication:
- United States
- Language:
- English
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