TIME-OF-FLIGHT METHOD OF DETERMINING VELOCITIES OF SPUTTERED ATOMS
S>A method is described whereby velocities of sputtered atoms are determined by pulsing a target and measuring the transit time of sputtered atoms. The method permits determination of the distribution of velocities of sputtered atoms. The target pulse generator and the problems involved in pulsing a target are discussed. The photoncounting system used for determining transit times is described and a typical set of data is presented. (auth)
- Research Organization:
- General Mills, Inc., Minneapolis
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-17-020330
- OSTI ID:
- 4697128
- Journal Information:
- Rev. Sci. Instr., Vol. Vol: 34; Other Information: Orig. Receipt Date: 31-DEC-63
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
Similar Records
Multiphoton ionization followed by time-of-flight mass spectroscopy of sputtered neutrals
Velocity distribution function of sputtered Cu atoms obtained by time resolved optical absorption spectroscopy
Characterization of energetic and thermalized sputtered atoms in pulsed plasma using time-resolved tunable diode-laser induced fluorescence
Conference
·
Thu Jan 01 00:00:00 EST 1987
·
OSTI ID:4697128
Velocity distribution function of sputtered Cu atoms obtained by time resolved optical absorption spectroscopy
Journal Article
·
Fri Jan 15 00:00:00 EST 2010
· Review of Scientific Instruments
·
OSTI ID:4697128
+1 more
Characterization of energetic and thermalized sputtered atoms in pulsed plasma using time-resolved tunable diode-laser induced fluorescence
Journal Article
·
Mon Nov 03 00:00:00 EST 2014
· Applied Physics Letters
·
OSTI ID:4697128
+1 more