U.S. Department of EnergyOffice of Scientific and Technical Information
A near-field optical microscopy nanoarray
Abstract
Multiplexing near-field scanning optical microscopy (NSOM) by the use of a nanoarray with parallel imaging is studied. The fabrication, characterization, and utilization of nanoarrays with {approximately} 100 nm diameter apertures spaced 500 nm center-to- center is presented. Extremely uniform nanoarrays with {approximately} 10{sup 8} apertures were fabricated by electron beam lithography and reactive ion etching. The nanoarrays were characterized by atomic force microscopy (AFM) and scanning electron microscopy (SEM). In this paper we utilize these nanoarrays in a laser-illuminated microscope with parallel detection on a charge- coupled device (CCD). Detection of B-phycoerythrin (B-PE) molecules using near-field illumination is presented. In principle, our system can be used to obtain high lateral resolution NSOM images over a wide-field of view (e.g. 50-100 {mu}m) within seconds.
- Authors:
-
- Los Alamos National Lab., NM (United States)
- Sandia National Labs., Albuquerque, NM (United States)
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 469055
- Report Number(s):
- SAND-96-2036C; CONF-970231-27
ON: DE97004650
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Conference
- Resource Relation:
- Conference: SPIE international symposium, San Jose, CA (United States), 8-14 Feb 1997; Other Information: PBD: [1996]
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; 36 MATERIALS SCIENCE; OPTICAL MICROSCOPES; FABRICATION; SCANNING LIGHT MICROSCOPY; SCANNING ELECTRON MICROSCOPY; FLUORESCENCE; IMAGE PROCESSING; ALUMINIUM; SILICON; NEODYMIUM LASERS; PMMA
Citation Formats
Semin, D J, Ambrose, W P, Goodwin, P M, Kwller, A, and Wendt, J R. A near-field optical microscopy nanoarray. United States: N. p., 1996.
Web.
Semin, D J, Ambrose, W P, Goodwin, P M, Kwller, A, & Wendt, J R. A near-field optical microscopy nanoarray. United States.
Semin, D J, Ambrose, W P, Goodwin, P M, Kwller, A, and Wendt, J R. 1996.
"A near-field optical microscopy nanoarray". United States. https://www.osti.gov/servlets/purl/469055.
@article{osti_469055,
title = {A near-field optical microscopy nanoarray},
author = {Semin, D J and Ambrose, W P and Goodwin, P M and Kwller, A and Wendt, J R},
abstractNote = {Multiplexing near-field scanning optical microscopy (NSOM) by the use of a nanoarray with parallel imaging is studied. The fabrication, characterization, and utilization of nanoarrays with {approximately} 100 nm diameter apertures spaced 500 nm center-to- center is presented. Extremely uniform nanoarrays with {approximately} 10{sup 8} apertures were fabricated by electron beam lithography and reactive ion etching. The nanoarrays were characterized by atomic force microscopy (AFM) and scanning electron microscopy (SEM). In this paper we utilize these nanoarrays in a laser-illuminated microscope with parallel detection on a charge- coupled device (CCD). Detection of B-phycoerythrin (B-PE) molecules using near-field illumination is presented. In principle, our system can be used to obtain high lateral resolution NSOM images over a wide-field of view (e.g. 50-100 {mu}m) within seconds.},
doi = {},
url = {https://www.osti.gov/biblio/469055},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {12}
}