skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: A near-field optical microscopy nanoarray

Abstract

Multiplexing near-field scanning optical microscopy (NSOM) by the use of a nanoarray with parallel imaging is studied. The fabrication, characterization, and utilization of nanoarrays with {approximately} 100 nm diameter apertures spaced 500 nm center-to- center is presented. Extremely uniform nanoarrays with {approximately} 10{sup 8} apertures were fabricated by electron beam lithography and reactive ion etching. The nanoarrays were characterized by atomic force microscopy (AFM) and scanning electron microscopy (SEM). In this paper we utilize these nanoarrays in a laser-illuminated microscope with parallel detection on a charge- coupled device (CCD). Detection of B-phycoerythrin (B-PE) molecules using near-field illumination is presented. In principle, our system can be used to obtain high lateral resolution NSOM images over a wide-field of view (e.g. 50-100 {mu}m) within seconds.

Authors:
; ; ;  [1];  [2]
  1. Los Alamos National Lab., NM (United States)
  2. Sandia National Labs., Albuquerque, NM (United States)
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
469055
Report Number(s):
SAND-96-2036C; CONF-970231-27
ON: DE97004650
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: SPIE international symposium, San Jose, CA (United States), 8-14 Feb 1997; Other Information: PBD: [1996]
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; 36 MATERIALS SCIENCE; OPTICAL MICROSCOPES; FABRICATION; SCANNING LIGHT MICROSCOPY; SCANNING ELECTRON MICROSCOPY; FLUORESCENCE; IMAGE PROCESSING; ALUMINIUM; SILICON; NEODYMIUM LASERS; PMMA

Citation Formats

Semin, D J, Ambrose, W P, Goodwin, P M, Kwller, A, and Wendt, J R. A near-field optical microscopy nanoarray. United States: N. p., 1996. Web.
Semin, D J, Ambrose, W P, Goodwin, P M, Kwller, A, & Wendt, J R. A near-field optical microscopy nanoarray. United States.
Semin, D J, Ambrose, W P, Goodwin, P M, Kwller, A, and Wendt, J R. 1996. "A near-field optical microscopy nanoarray". United States. https://www.osti.gov/servlets/purl/469055.
@article{osti_469055,
title = {A near-field optical microscopy nanoarray},
author = {Semin, D J and Ambrose, W P and Goodwin, P M and Kwller, A and Wendt, J R},
abstractNote = {Multiplexing near-field scanning optical microscopy (NSOM) by the use of a nanoarray with parallel imaging is studied. The fabrication, characterization, and utilization of nanoarrays with {approximately} 100 nm diameter apertures spaced 500 nm center-to- center is presented. Extremely uniform nanoarrays with {approximately} 10{sup 8} apertures were fabricated by electron beam lithography and reactive ion etching. The nanoarrays were characterized by atomic force microscopy (AFM) and scanning electron microscopy (SEM). In this paper we utilize these nanoarrays in a laser-illuminated microscope with parallel detection on a charge- coupled device (CCD). Detection of B-phycoerythrin (B-PE) molecules using near-field illumination is presented. In principle, our system can be used to obtain high lateral resolution NSOM images over a wide-field of view (e.g. 50-100 {mu}m) within seconds.},
doi = {},
url = {https://www.osti.gov/biblio/469055}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {12}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: