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Title: Stress reduction in PACVD amorphous diamond coatings by boron addition

Abstract

The applications of super hard coatings of diamond-like carbon (DLC) films are often limited by adhesion problems caused by intrinsic stress in the deposited layer due to the PACVD growth process. One approach to reduce the stress are less optimal process parameters. However, they also affect the desired high hardness of the films. Their approach in this study is to add B{sub 2}H{sub 6} to the gas mixture, which shifts the composition towards another very hard compound (B{sub 4}C). A sequence of amorphous B{sub x}C{sub 1{minus}x}:H films with a thickness of 0.5 {micro}m and a boron content between 0 and 50 at. % were deposited on silicon substrates using a capacitively coupled r.f. PACVD indentation and laser reflection measurements. For an addition of x {ge} 5 at. % boron the decrease of the internal film stress is found to be clearly larger than the effect on the hardness value. For boron contents x > 18% the internal stress is reduced by a factor of 5 while the reduction of hardness is only a factor of 2.3. For microscopic structure analysis Raman and infrared spectroscopy are applied. They reveal an increasing hydrogenation of the carbon network. Therefore, the softening is attributedmore » to a boron induced modification to a more polymeric-like material.« less

Authors:
; ;  [1];  [2];  [3];  [4]
  1. Univ. Notre-Dame de la Paix, Namur (Belgium)
  2. Vlaams Instelling voor Technologisch Onderzoek, Mol (Belgium). Materials Div.
  3. RWTH-Aachen (Germany). I. Physikalisches Inst.
  4. Technical Univ. of Eindhoven (Netherlands). Cyclotron Lab.
Publication Date:
Sponsoring Org.:
European Union EU, Brussels (Belgium)
OSTI Identifier:
467598
Report Number(s):
CONF-960401-
ISBN 1-55899-339-8; TRN: IM9721%%26
Resource Type:
Book
Resource Relation:
Conference: Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 8-12 Apr 1996; Other Information: PBD: 1997; Related Information: Is Part Of Thin films: Stresses and mechanical properties VI; Gerberich, W.W. [ed.] [Univ. of Minnesota, Minneapolis, MN (United States)]; Gao, H. [ed.] [Stanford Univ., CA (United States)]; Sundgren, J.E. [ed.] [Linkoeping Univ. (Sweden)]; Baker, S.P. [ed.] [Max-Planck-Inst. fuer Metallforschung, Stuttgart (Germany)]; PB: 559 p.; Materials Research Society symposium proceedings, Volume 436
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CHEMICAL VAPOR DEPOSITION; MECHANICAL PROPERTIES; DIAMONDS; BORON CARBIDES; HYDROGEN; SUBSTRATES; SILICON; GLASS; AMORPHOUS STATE; STRESSES; HARDNESS; EXPERIMENTAL DATA

Citation Formats

Wagner, V., Sporken, R., Caudano, R., Dekempeneer, E.H.A., Geurts, J., and Ijzendoorn, L.J. van. Stress reduction in PACVD amorphous diamond coatings by boron addition. United States: N. p., 1997. Web.
Wagner, V., Sporken, R., Caudano, R., Dekempeneer, E.H.A., Geurts, J., & Ijzendoorn, L.J. van. Stress reduction in PACVD amorphous diamond coatings by boron addition. United States.
Wagner, V., Sporken, R., Caudano, R., Dekempeneer, E.H.A., Geurts, J., and Ijzendoorn, L.J. van. Thu . "Stress reduction in PACVD amorphous diamond coatings by boron addition". United States.
@article{osti_467598,
title = {Stress reduction in PACVD amorphous diamond coatings by boron addition},
author = {Wagner, V. and Sporken, R. and Caudano, R. and Dekempeneer, E.H.A. and Geurts, J. and Ijzendoorn, L.J. van},
abstractNote = {The applications of super hard coatings of diamond-like carbon (DLC) films are often limited by adhesion problems caused by intrinsic stress in the deposited layer due to the PACVD growth process. One approach to reduce the stress are less optimal process parameters. However, they also affect the desired high hardness of the films. Their approach in this study is to add B{sub 2}H{sub 6} to the gas mixture, which shifts the composition towards another very hard compound (B{sub 4}C). A sequence of amorphous B{sub x}C{sub 1{minus}x}:H films with a thickness of 0.5 {micro}m and a boron content between 0 and 50 at. % were deposited on silicon substrates using a capacitively coupled r.f. PACVD indentation and laser reflection measurements. For an addition of x {ge} 5 at. % boron the decrease of the internal film stress is found to be clearly larger than the effect on the hardness value. For boron contents x > 18% the internal stress is reduced by a factor of 5 while the reduction of hardness is only a factor of 2.3. For microscopic structure analysis Raman and infrared spectroscopy are applied. They reveal an increasing hydrogenation of the carbon network. Therefore, the softening is attributed to a boron induced modification to a more polymeric-like material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1997},
month = {5}
}

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