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Title: Formation of a buried soft layer in SiC for compliant substrate by ion implantation

Abstract

Radiation damage and its removal have been studied in ion implanted 6H-SiC by Rutherford backscattering/Channeling (RBS). They have implanted Ga and Ti at 800 C using doses of 1 {times} 10{sup 16} to 2 {times} 10{sup 17} cm{sup {minus}2}. The implanted samples have been subsequently annealed at 1,050 C, and then at 1,400 C for 30 sec to study the removal of damage produced during implantation. The energies of implanted species have been chosen to obtain 20--40 nm projected ranges to form a buried metallic or graphitic layer. No significant damage removal has been observed after 1,050 C anneal, however 1,400 C annealing of 40 and 120 keV Ga implanted samples (fluence 2 {times} 10{sup 16} cm{sup {minus}2}) resulted in significantly less damage as can be observed from RBS/Channeling data. In the case of Ti implanted samples annealing led to an appreciable increase in the channeled backscattering yield, which might be due to the formation of some new phase (e.g., TiSi or TiSi{sub 2}) and may be related to distortions of the existing lattice.

Authors:
; ;  [1];  [2];  [3]
  1. Univ. of North Carolina, Chapel Hill, NC (United States). Dept. of Physics and Astronomy
  2. Oak Ridge National Lab., TN (United States). Div. of Metals and Ceramics
  3. North Carolina State Univ., Raleigh, NC (United States). Dept. of Materials Science and Engineering
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Energy Research, Washington, DC (United States)
OSTI Identifier:
459397
Report Number(s):
CONF-961202-72
ON: DE97004287; TRN: 97:006744
DOE Contract Number:  
AC05-96OR22464
Resource Type:
Technical Report
Resource Relation:
Conference: 1996 Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 2-6 Dec 1996; Other Information: PBD: [1997]
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ION IMPLANTATION; SILICON CARBIDES; PHYSICAL RADIATION EFFECTS; GALLIUM IONS; TITANIUM IONS; ANNEALING; EXPERIMENTAL DATA

Citation Formats

Lioubtchenko, M, Suvkhanov, A, Parikh, N, Hunn, J, and Bray, D. Formation of a buried soft layer in SiC for compliant substrate by ion implantation. United States: N. p., 1997. Web. doi:10.2172/459397.
Lioubtchenko, M, Suvkhanov, A, Parikh, N, Hunn, J, & Bray, D. Formation of a buried soft layer in SiC for compliant substrate by ion implantation. United States. https://doi.org/10.2172/459397
Lioubtchenko, M, Suvkhanov, A, Parikh, N, Hunn, J, and Bray, D. 1997. "Formation of a buried soft layer in SiC for compliant substrate by ion implantation". United States. https://doi.org/10.2172/459397. https://www.osti.gov/servlets/purl/459397.
@article{osti_459397,
title = {Formation of a buried soft layer in SiC for compliant substrate by ion implantation},
author = {Lioubtchenko, M and Suvkhanov, A and Parikh, N and Hunn, J and Bray, D},
abstractNote = {Radiation damage and its removal have been studied in ion implanted 6H-SiC by Rutherford backscattering/Channeling (RBS). They have implanted Ga and Ti at 800 C using doses of 1 {times} 10{sup 16} to 2 {times} 10{sup 17} cm{sup {minus}2}. The implanted samples have been subsequently annealed at 1,050 C, and then at 1,400 C for 30 sec to study the removal of damage produced during implantation. The energies of implanted species have been chosen to obtain 20--40 nm projected ranges to form a buried metallic or graphitic layer. No significant damage removal has been observed after 1,050 C anneal, however 1,400 C annealing of 40 and 120 keV Ga implanted samples (fluence 2 {times} 10{sup 16} cm{sup {minus}2}) resulted in significantly less damage as can be observed from RBS/Channeling data. In the case of Ti implanted samples annealing led to an appreciable increase in the channeled backscattering yield, which might be due to the formation of some new phase (e.g., TiSi or TiSi{sub 2}) and may be related to distortions of the existing lattice.},
doi = {10.2172/459397},
url = {https://www.osti.gov/biblio/459397}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Mar 01 00:00:00 EST 1997},
month = {Sat Mar 01 00:00:00 EST 1997}
}