SPUTTERING EXPERIMENTS WITH 1- TO 5-keV Ar$sup +$ IONS. III. MONOCRYSTAL TARGETS OF THE HEXAGONAL METALS Mg, Zn, Zr, AND Cd.
Journal Article
·
· J. Appl. Phys., 39: 3463-75 (June 1968).
OSTI ID:4518909
- Research Organization:
- Oak Ridge National Lab., Tenn.
- DOE Contract Number:
- W-7405-ENG-26
- NSA Number:
- NSA-22-036729
- OSTI ID:
- 4518909
- Report Number(s):
- ORNL-P-3473
- Journal Information:
- J. Appl. Phys., 39: 3463-75 (June 1968)., Other Information: Orig. Receipt Date: 31-DEC-68
- Country of Publication:
- United States
- Language:
- English
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OSTI ID:4518909
Related Subjects
N32210* -Physics-Atomic & Molecular Physics-Atomic
Electron
Ion & Molecular Beams & Reactions
ARGON
CADMIUM
EFFICIENCY
IONS
KEV RANGE
SPUTTERING MANGANESE
ZINC
ZIRCONIUM
CADMIUM/sputtering by argon ions at 1 to 5 keV
yields and ejection patterns from
(E)
ZIRCONIUM/argon ion sputtering at 1 to 5 keV
yields and ejection patterns from
(E)
ARGON IONS/reactions with metals
yields and ejection patterns from sputtering
(E)
MAGNESIUM/argon ion sputtering at 1 to 5 keV
yields and ejection patterns from
(E)
ZINC/argon ion sputtering at 1 to 5 keV
yields and ejection patterns from
(E)
Electron
Ion & Molecular Beams & Reactions
ARGON
CADMIUM
EFFICIENCY
IONS
KEV RANGE
SPUTTERING MANGANESE
ZINC
ZIRCONIUM
CADMIUM/sputtering by argon ions at 1 to 5 keV
yields and ejection patterns from
(E)
ZIRCONIUM/argon ion sputtering at 1 to 5 keV
yields and ejection patterns from
(E)
ARGON IONS/reactions with metals
yields and ejection patterns from sputtering
(E)
MAGNESIUM/argon ion sputtering at 1 to 5 keV
yields and ejection patterns from
(E)
ZINC/argon ion sputtering at 1 to 5 keV
yields and ejection patterns from
(E)