In-line materials quality monitor for crystalline silicon solar cell fabrication
- Department of Materials Science and Engineering Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 (United States)
Radio Frequency Photoconductance Decay (RFPCD) for monitoring minority carrier lifetime and a laser scanning stress measurement system are useful in-line monitors for photovoltaic manufacture. RFPCD has been used to monitor etching processes, detect copper deposition on substrate surfaces, study the effect of aluminum alloying on minority carrier lifetime and for wafer mapping. The stress measurement system has been used to study the stress associated with the aluminum backside contact. Models of metallic contamination and defect reactions provide a necessary intellectual framework for the application of these measurements and for their role in process design. {copyright} {ital 1996 American Institute of Physics.}
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 450132
- Report Number(s):
- CONF-9605265-; ISSN 0094-243X; TRN: 9703M0063
- Journal Information:
- AIP Conference Proceedings, Vol. 353, Issue 1; Conference: 13. NREL photovoltaics program review meeting, Lakewood, CO (United States), 16-19 May 1996; Other Information: PBD: Jan 1996
- Country of Publication:
- United States
- Language:
- English
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