Magnetic field effects in RF magnetron sputtering of CdS/CdTe solar cells

Journal Article · Mon Jan 01 00:00:00 EST 1996 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.49427· OSTI ID:450114

Compaan, A D; Shao, M; Tabory, C N; Feng, Z; Fischer, A; Shen, F; Narayanswami, C; Bohn, R G ^[1]

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1. Dept. of Physics and Astronomy, The University of Toledo, Toledo, Ohio 43606 (United States)

We have studied effects of magnetic field strength and configuration on rf planar magnetron sputtering of CdS and CdTe. This study was carried out with one sputter gun having an unbalanced magnetic field and a second gun having an approximately balanced magnetic field. The unbalanced field gun produces significantly higher ion and electron bombardment of the film during growth and slightly higher electron kinetic energies. Films produced with the unbalanced gun show much stronger photoluminescence and cell performance is much better when the CdTe is deposited with the unbalanced gun. {copyright} {ital 1996 American Institute of Physics.}

• OSTI ID: 450114
• Report Number(s): CONF-9605265-; ISSN 0094-243X; TRN: 9703M0042
• Journal Information: AIP Conference Proceedings, Vol. 353, Issue 1; Conference: 13. NREL photovoltaics program review meeting, Lakewood, CO (United States), 16-19 May 1996; Other Information: PBD: Jan 1996
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
SOLAR CELLS
ELECTRICAL PROPERTIES
SPUTTERING
MAGNETIC FIELDS
CADMIUM SULFIDES
CADMIUM TELLURIDES
THIN FILMS
CRYSTAL GROWTH
PHOTOLUMINESCENCE
ELECTRIC CONDUCTIVITY