Fabrication and packaging of integrated chemo-optical sensors
- MESA Research Inst., Enschede (Netherlands)
In this contribution, the authors will present a scheme for the fabrication of an optical chip, consisting of an integrated Mach-Zehnder interferometer and self-aligning fiber-to-chip connection units. These units are essentially based on photolithografically defined V-shaped grooves in the silicon substrate, combined with a smooth sawcut. This sawcut is used as the optical waveguide endface. In this way, the normally needed optical chip polishing and external fiber-to-chip alignment can be avoided. The waveguide configuration itself is optimized with respect to the sensor sensitivity. The waveguiding material itself is ZnO, thereby enabling active (electro-optical) modulation of the interferometer output.
- OSTI ID:
- 441250
- Report Number(s):
- CONF-960782-; TRN: 96:006557-0021
- Resource Relation:
- Conference: 6. international meeting on chemical sensors, Gaithersburg, MD (United States), 22-25 Jul 1996; Other Information: PBD: 1996; Related Information: Is Part Of The 6th international meeting on chemical sensors; PB: 313 p.
- Country of Publication:
- United States
- Language:
- English
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