Phase-shifting point diffraction interferometer
- Center for X-Ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)
- Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, Berkeley, California 94720 (United States)
We describe a novel interferometer design suitable for highly accurate measurement of wave-front aberrations over a wide range of wavelengths, from visible to x ray. The new design, based on the point diffraction interferometer, preserves the advantages of the conventional point diffraction interferometer but offers higher efficiency and improved accuracy through phase shifting. These qualities make it applicable to at-wavelength testing of many optical systems, including short-wavelength projection lithography optics. A visible-light prototype was built and operated. {copyright} {ital 1996 Optical Society of America.}
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 434724
- Journal Information:
- Optics Letters, Vol. 21, Issue 19; Other Information: PBD: Oct 1996
- Country of Publication:
- United States
- Language:
- English
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