Effects of deposition parameters on properties of rf sputtered molybdenum films
Journal Article
·
· J. Vac. Sci. Technol., v. 11, no. 4, pp. 675-679
- Research Organization:
- Energy Conversion Devices, Inc., Troy, Michigan 48084
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-30-024664
- OSTI ID:
- 4282145
- Journal Information:
- J. Vac. Sci. Technol., v. 11, no. 4, pp. 675-679, Other Information: Orig. Receipt Date: 31-DEC-74
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
N50230* -Metals
Ceramics
& Other Materials-Metals & Alloys-Properties
Structure & Phase Studies
N50220 -Metals
Ceramics
& Other Materials-Metals & Alloys-Preparation & Fabrication
*MOLYBDENUM- SPUTTERING
CRYSTAL GROWTH
ELECTRIC CONDUCTIVITY
ELECTRON MICROSCOPY
FILMS
MOLYBDENUM NITRIDES
NITROGEN
OXYGEN
QUANTITATIVE CHEMICAL ANALYSIS
RF SYSTEMS
STRESS ANALYSIS
X-RAY DIFFRACTION
Ceramics
& Other Materials-Metals & Alloys-Properties
Structure & Phase Studies
N50220 -Metals
Ceramics
& Other Materials-Metals & Alloys-Preparation & Fabrication
*MOLYBDENUM- SPUTTERING
CRYSTAL GROWTH
ELECTRIC CONDUCTIVITY
ELECTRON MICROSCOPY
FILMS
MOLYBDENUM NITRIDES
NITROGEN
OXYGEN
QUANTITATIVE CHEMICAL ANALYSIS
RF SYSTEMS
STRESS ANALYSIS
X-RAY DIFFRACTION