Fabrication of electrically insulating regions in optical devices by proton bombardment
Patent
·
OSTI ID:4275337
- Research Organization:
- Originating Research Org. not identified
- NSA Number:
- NSA-30-018867
- Assignee:
- to Bell Telephone Labs.
- Patent Number(s):
- 3824133
- OSTI ID:
- 4275337
- Resource Relation:
- Patent File Date: 1971 Dec 01; Other Information: H0117/54. Orig. Receipt Date: 31-DEC-74
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
N48210* -Life Sciences-Radiation Effects on Cells- External Source
*GALLIUM ARSENIDES- PHYSICAL RADIATION EFFECTS
*GALLIUM PHOSPHIDES- PHYSICAL RADIATION EFFECTS
*LASERS- FABRICATION
*LIGHT EMITTING DIODES- FABRICATION
*SEMICONDUCTOR DEVICES- PHYSICAL RADIATION EFFECTS
*SEMICONDUCTOR JUNCTIONS- FABRICATION
ANNEALING
ELECTRIC CONDUCTIVITY
PROTON BEAMS
*GALLIUM ARSENIDES- PHYSICAL RADIATION EFFECTS
*GALLIUM PHOSPHIDES- PHYSICAL RADIATION EFFECTS
*LASERS- FABRICATION
*LIGHT EMITTING DIODES- FABRICATION
*SEMICONDUCTOR DEVICES- PHYSICAL RADIATION EFFECTS
*SEMICONDUCTOR JUNCTIONS- FABRICATION
ANNEALING
ELECTRIC CONDUCTIVITY
PROTON BEAMS