Migration of Mo atoms across Mo-Si interface induced by Ar$sup +$ ion bombardment
Journal Article
·
· Appl. Phys. Lett., v. 25, no. 6, pp. 337-339
OSTI ID:4274798
- Research Organization:
- Fujitsu Laboratories Limited, Kamikodanaka, Kawasaki, Japan
- NSA Number:
- NSA-30-027499
- OSTI ID:
- 4274798
- Journal Information:
- Appl. Phys. Lett., v. 25, no. 6, pp. 337-339, Other Information: Orig. Receipt Date: 31-DEC-74
- Country of Publication:
- United States
- Language:
- English
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