A method of utilizing lithium-induced nuclear reactions in the determination of carbon, nitrogen, and oxygen in thin films
Journal Article
·
· Appl. Phys. Lett., v. 26, no. 9, pp. 543-545
- Research Organization:
- Laboratoire de Physique Nucleaire, Universite de Montreal, Montreal, Canada
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-32-000015
- OSTI ID:
- 4194830
- Journal Information:
- Appl. Phys. Lett., v. 26, no. 9, pp. 543-545, Other Information: Orig. Receipt Date: 31-DEC-75
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
N40110* -Chemistry-Analytical & Separations Chemistry- Activation & Nuclear Reaction Procedures
*CARBON- NUCLEAR REACTION ANALYSIS
*NIOBIUM- NUCLEAR REACTION ANALYSIS
*NITROGEN- NUCLEAR REACTION ANALYSIS
*OXYGEN- NUCLEAR REACTION ANALYSIS
FILMS
IMPURITIES
LITHIUM 6 BEAMS
MEV RANGE 01-10
SPUTTERING
*CARBON- NUCLEAR REACTION ANALYSIS
*NIOBIUM- NUCLEAR REACTION ANALYSIS
*NITROGEN- NUCLEAR REACTION ANALYSIS
*OXYGEN- NUCLEAR REACTION ANALYSIS
FILMS
IMPURITIES
LITHIUM 6 BEAMS
MEV RANGE 01-10
SPUTTERING