Scanned probe microscopy for thin film superconductor development

Conference · Tue Dec 31 00:00:00 EST 1996

OSTI ID:415054

Moreland, J ^[1]

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1. National Institute of Standards and Technology, Boulder, CO (United States)

Scanned probe microscopy is a general term encompassing the science of imaging based on piezoelectric driven probes for measuring local changes in nanoscale properties of materials and devices. Techniques like scanning tunneling microscopy, atomic force microscopy, and scanning potentiometry are becoming common tools in the production and development labs in the semiconductor industry. The author presents several examples of applications specific to the development of high temperature superconducting thin films and thin-film devices.

• Research Organization: Argonne National Lab. (ANL), Argonne, IL (United States)
• DOE Contract Number: AI05-89ER14044
• OSTI ID: 415054
• Report Number(s): CONF-9605186-; ON: DE96015339; TRN: 96:005794-0002
• Resource Relation: Conference: 14. symposium on energy engineering sciences: mechanical sciences, Argonne, IL (United States), 15-17 May 1996; Other Information: PBD: [1996]; Related Information: Is Part Of Proceedings of the fourteenth symposium on energy engineering sciences: Mechanical sciences: Solids and fluids; PB: 226 p.
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
SUPERCONDUCTING FILMS
MICROSCOPY
IMAGES
THIN FILMS
SCANNING ELECTRON MICROSCOPY
HIGH-TC SUPERCONDUCTORS