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Title: High energy metal ion implantation using `Magis`, a novel, broad-beam, Marx-generator-based ion source

Abstract

Ion energy of the beam formed by an ion source is proportional to extractor voltage and ion charge state. Increasing the voltage is difficult and costly for extraction voltage over 100 kV. Here we explore the possibility of increasing the charge states of metal ions to facilitate high-energy, broad beam ion implantation at a moderate voltage level. Strategies to enhance the ion charge state include operating in the regimes of high-current vacuum sparks and short pulses. Using a time-of-flight technique we have measured charge states as high as 7+ (73 kA vacuum spark discharge) and 4+ (14 kA short pulse arc discharge), both for copper, with the mean ion charge states about 6.0 and 2.5, respectively. Pulsed discharges can conveniently be driven by a modified Marx generator, allowing operation of ``Magis`` with a single power supply (at ground potential) for both plasma production and ion extraction.

Authors:
; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Energy Research, Washington, DC (United States)
OSTI Identifier:
405756
Report Number(s):
LBL-38512; CONF-960994-12
ON: DE97000914; TRN: 97:001224
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Conference
Resource Relation:
Conference: IBMM `96: 10. international conference on ion beam modification of materials, Albuquerque, NM (United States), 1-6 Sep 1996; Other Information: PBD: Aug 1996
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; COPPER IONS; ION IMPLANTATION; ION SOURCES; BEAM DYNAMICS; MARX GENERATORS; CHARGE STATES; ELECTRIC ARCS

Citation Formats

Anders, A, Brown, I G, Dickinson, M R, and MacGill, R A. High energy metal ion implantation using `Magis`, a novel, broad-beam, Marx-generator-based ion source. United States: N. p., 1996. Web.
Anders, A, Brown, I G, Dickinson, M R, & MacGill, R A. High energy metal ion implantation using `Magis`, a novel, broad-beam, Marx-generator-based ion source. United States.
Anders, A, Brown, I G, Dickinson, M R, and MacGill, R A. 1996. "High energy metal ion implantation using `Magis`, a novel, broad-beam, Marx-generator-based ion source". United States. https://www.osti.gov/servlets/purl/405756.
@article{osti_405756,
title = {High energy metal ion implantation using `Magis`, a novel, broad-beam, Marx-generator-based ion source},
author = {Anders, A and Brown, I G and Dickinson, M R and MacGill, R A},
abstractNote = {Ion energy of the beam formed by an ion source is proportional to extractor voltage and ion charge state. Increasing the voltage is difficult and costly for extraction voltage over 100 kV. Here we explore the possibility of increasing the charge states of metal ions to facilitate high-energy, broad beam ion implantation at a moderate voltage level. Strategies to enhance the ion charge state include operating in the regimes of high-current vacuum sparks and short pulses. Using a time-of-flight technique we have measured charge states as high as 7+ (73 kA vacuum spark discharge) and 4+ (14 kA short pulse arc discharge), both for copper, with the mean ion charge states about 6.0 and 2.5, respectively. Pulsed discharges can conveniently be driven by a modified Marx generator, allowing operation of ``Magis`` with a single power supply (at ground potential) for both plasma production and ion extraction.},
doi = {},
url = {https://www.osti.gov/biblio/405756}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {8}
}

Conference:
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