Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals
A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 {mu}m order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method. {copyright} 2001 American Institute of Physics.
- Sponsoring Organization:
- (US)
- OSTI ID:
- 40230684
- Journal Information:
- Applied Physics Letters, Vol. 79, Issue 6; Other Information: DOI: 10.1063/1.1391232; Othernumber: APPLAB000079000006000725000001; 023132APL; PBD: 6 Aug 2001; ISSN 0003-6951
- Publisher:
- The American Physical Society
- Country of Publication:
- United States
- Language:
- English
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