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Title: Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.1391232· OSTI ID:40230684

A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 {mu}m order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method. {copyright} 2001 American Institute of Physics.

Sponsoring Organization:
(US)
OSTI ID:
40230684
Journal Information:
Applied Physics Letters, Vol. 79, Issue 6; Other Information: DOI: 10.1063/1.1391232; Othernumber: APPLAB000079000006000725000001; 023132APL; PBD: 6 Aug 2001; ISSN 0003-6951
Publisher:
The American Physical Society
Country of Publication:
United States
Language:
English

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