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Title: Interaction of copper metallization with rare-earth metals and silicides

Abstract

Solid-phase reactions of copper films with underlying gadolinium, erbium, and erbium{endash}silicide layers on Si(100) substrates were investigated. For the phase analysis, x-ray diffraction and cross-sectional transmission electron microscopy were used. In the case of Cu/Gd/Si(100), an orthorhombic GdSi{sub 2} formed, and, at higher temperatures, copper aggregated into islands. Annealed Cu/Er/Si(100) samples resulted in a hexagonal Er{sub 5}Si{sub 3} phase. In the Cu/ErSi{sub 2{minus}x}/Si system, the copper catalyzes the transformation of the highly oriented hexagonal ErSi{sub 2{minus}x} phase into hexagonal Er{sub 5}Si{sub 3}. Diverse phase developments of the samples with Gd and Er are based on reactivity differences of the two rare-earth metals. {copyright} 2001 American Institute of Physics.

Authors:
; ; ;
Publication Date:
Sponsoring Org.:
(US)
OSTI Identifier:
40204403
Alternate Identifier(s):
OSTI ID: 40204403
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 90; Journal Issue: 1; Other Information: DOI: 10.1063/1.1378054; Othernumber: JAPIAU000090000001000503000001; 001114JAP; PBD: 1 Jul 2001
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; COPPER; ERBIUM; GADOLINIUM; ISLANDS; PHYSICS; SILICIDES; SUBSTRATES; TRANSFORMATIONS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION

Citation Formats

Molnar, G. L., Peto, G., Zsoldos, E., and Horvath, Z. E. Interaction of copper metallization with rare-earth metals and silicides. United States: N. p., 2001. Web. doi:10.1063/1.1378054.
Molnar, G. L., Peto, G., Zsoldos, E., & Horvath, Z. E. Interaction of copper metallization with rare-earth metals and silicides. United States. doi:10.1063/1.1378054.
Molnar, G. L., Peto, G., Zsoldos, E., and Horvath, Z. E. Sun . "Interaction of copper metallization with rare-earth metals and silicides". United States. doi:10.1063/1.1378054.
@article{osti_40204403,
title = {Interaction of copper metallization with rare-earth metals and silicides},
author = {Molnar, G. L. and Peto, G. and Zsoldos, E. and Horvath, Z. E.},
abstractNote = {Solid-phase reactions of copper films with underlying gadolinium, erbium, and erbium{endash}silicide layers on Si(100) substrates were investigated. For the phase analysis, x-ray diffraction and cross-sectional transmission electron microscopy were used. In the case of Cu/Gd/Si(100), an orthorhombic GdSi{sub 2} formed, and, at higher temperatures, copper aggregated into islands. Annealed Cu/Er/Si(100) samples resulted in a hexagonal Er{sub 5}Si{sub 3} phase. In the Cu/ErSi{sub 2{minus}x}/Si system, the copper catalyzes the transformation of the highly oriented hexagonal ErSi{sub 2{minus}x} phase into hexagonal Er{sub 5}Si{sub 3}. Diverse phase developments of the samples with Gd and Er are based on reactivity differences of the two rare-earth metals. {copyright} 2001 American Institute of Physics.},
doi = {10.1063/1.1378054},
journal = {Journal of Applied Physics},
number = 1,
volume = 90,
place = {United States},
year = {Sun Jul 01 00:00:00 EDT 2001},
month = {Sun Jul 01 00:00:00 EDT 2001}
}
  • The formation of silicides from thin films of the rare-earth (or related) elements Y, Tb, and Er, on both (100) and (111) Si substrates, has been investigated simultaneously with backscattering and x-ray diffraction. The silicon-rich compounds of the type R-ESi/sub 2-n/ form almost directly with no, or only poorly distinct formation of other silicides at temperatures from about 300 to 500 /sup 0/C. For all three metals, the reactions with (111) Si require temperatures some 100 /sup 0/C higher than the reactions with (100) Si, a difference in behavior which is quite important considering the relatively low reaction temperatures. Themore » reactions of Er and Tb with (100) Si are quite sudden, indicating that nucleation is probably the controlling mechanism.« less
  • The Dy–Ni–Si system has been investigated at 1070 K by X-ray and microprobe analysis. The system contains the 12 known compounds DyNi{sub 10}Si{sub 2}, DyNi{sub 5}Si{sub 3}, DyNi{sub 6}Si{sub 6}, DyNi{sub 4}Si, DyNi{sub 2}Si{sub 2}, Dy{sub 2}Ni{sub 3}Si{sub 5}, DyNiSi{sub 3}, Dy{sub 3}Ni{sub 6}Si{sub 2}, DyNiSi{sub 2}, DyNiSi, Dy{sub 3}NiSi{sub 3}, Dy{sub 3}NiSi{sub 2}, and the new compounds Dy{sub 34}Ni{sub 16−27}Si{sub 50−39} (AlB{sub 2}-type), Dy{sub 2}Ni{sub 15.2−14.1}Si{sub 1.8−2.9} (Th{sub 2}Zn{sub 17}-type), ∼Dy{sub 11}Ni{sub 65}Si{sub 24}, ∼Dy{sub 16}Ni{sub 62}Si{sub 22} (unknown structures), DyNi{sub 7}Si{sub 6} (GdNi{sub 7}Si{sub 6}-type), Dy{sub 3}Ni{sub 8}Si (Ce{sub 3}Co{sub 8}Si-type), DyNi{sub 2}Si (YPd{sub 2}Si-type), ∼Dy{sub 40}Ni{sub 47}Si{submore » 13} and ∼Dy{sub 5}Ni{sub 2}Si{sub 3} (unknown structures). Quasi–binary solid solutions were detected at 1070 (870 K) for Dy{sub 2}Ni{sub 17}, DyNi{sub 5}, DyNi{sub 7}, DyNi{sub 3}, DyNi{sub 2}, DyNi, DySi{sub 2} and DySi{sub 1.67}. No detectable solubility is observed for the other binary compounds of the Dy–Ni–Si system. The crystal structures of new phases RNi{sub 7}Si{sub 6} (GdNi{sub 7}Si{sub 6}-type), R{sub 3}Ni{sub 8}Si (Ce{sub 3}Co{sub 8}Si-type), RNi{sub 2}Si (YPd{sub 2}Si-type) and R{sub 3}Ni{sub 12}Si{sub 4} (Gd{sub 3}Ru{sub 4}Al{sub 12}-type), with R=Y, Gd–Tm, has been studied. Magnetic properties of few representative compounds are also reported. - Graphical abstract: The Dy–Ni–Si system has been investigated at 1070 K by X-ray and microprobe analysis. The system contains the 12 known compounds DyNi{sub 10}Si{sub 2}, DyNi{sub 5}Si{sub 3}, DyNi{sub 6}Si{sub 6}, DyNi{sub 4}Si, DyNi{sub 2}Si{sub 2}, Dy{sub 2}Ni{sub 3}Si{sub 5}, DyNiSi{sub 3}, Dy{sub 3}Ni{sub 6}Si{sub 2}, DyNiSi{sub 2}, DyNiSi, Dy{sub 3}NiSi{sub 3}, Dy{sub 3}NiSi{sub 2}, and the new compounds Dy{sub 34}Ni{sub 16−27}Si{sub 50−39}, Dy{sub 2}Ni{sub 15.2−14.1}Si{sub 1.8−2.9}, ∼Dy{sub 11}Ni{sub 65}Si{sub 24}, ∼Dy{sub 16}Ni{sub 62}Si{sub 22}, DyNi{sub 7}Si{sub 6}, Dy{sub 3}Ni{sub 8}Si, DyNi{sub 2}Si, ∼Dy{sub 40}Ni{sub 47}Si{sub 13} and ∼Dy{sub 5}Ni{sub 2}Si{sub 3}. Quasi–binary solid solutions were detected for Dy{sub 2}Ni{sub 17}, DyNi{sub 5}, DyNi{sub 7}, DyNi{sub 3}, DyNi{sub 2}, DyNi, DySi{sub 2} and DySi{sub 1.67}. The crystal structures and magnetic properties of new phases RNi{sub 7}Si{sub 6} (GdNi{sub 7}Si{sub 6}-type), R{sub 3}Ni{sub 8}Si (Ce{sub 3}Co{sub 8}Si-type), RNi{sub 2}Si (YPd{sub 2}Si-type) and R{sub 3}Ni{sub 12}Si{sub 4} (Gd{sub 3}Ru{sub 4}Al{sub 12}-type), with R=Y, Gd–Tm, are also reported. - Highlights: • Dy–Ni–Si isothermal section was obtained at 870 K/1070 K. • Twelve known ternary dysprosium nickel silicides were confirmed in Dy–Ni–Si. • Nine new dysprosium nickel silicides were detected in Dy–Ni–Si. • Seventeen new rare earth nickel silicides were detected in (Y, Gd–Tm)–Ni–Si. • Tb{sub 3}Ni{sub 8}Si, Dy{sub 3}Ni{sub 8}Si, Ho{sub 3}Ni{sub 12}Si{sub 4} and DyNi{sub 2}Si show ferromagnetic-like ordering.« less
  • The Ce-Ni-Si system has been investigated at 870/1070 K by X-ray and microprobe analyses. The existence of the known compounds, i.e.: Ce{sub 2}Ni{sub 15.8}Si{sub 1.2} (Th{sub 2}Ni{sub 17}-type), Ce{sub 2}Ni{sub 15-14}Si{sub 2-3} (Th{sub 2}Zn{sub 17}-type), CeNi{sub 8.6}Si{sub 2.4} (BaCd{sub 11}-type), CeNi{sub 8.8}Si{sub 4.2} (LaCo{sub 9}Si{sub 4}-type), CeNi{sub 6}Si{sub 6} (CeNi{sub 6}Si{sub 6}-type), CeNi{sub 5}Si{sub 1-0.3} (TbCu{sub 7}-type), CeNi{sub 4}Si (YNi{sub 4}Si-type), CeNi{sub 2}Si{sub 2} (CeGa{sub 2}Al{sub 2}-type), Ce{sub 2}Ni{sub 3}Si{sub 5} (U{sub 2}Co{sub 3}Si{sub 5}-type), Ce{sub 3}Ni{sub 6}Si{sub 2} (Ce{sub 3}Ni{sub 6}Si{sub 2}-type), Ce{sub 3}Ni{sub 4}Si{sub 4} (U{sub 3}Ni{sub 4}Si{sub 4}-type), CeNiSi{sub 2} (CeNiSi{sub 2}-type), ~CeNi{sub 1.3}Si{sub 0.7} (unknown typemore » structure), Ce{sub 6}Ni{sub 7}Si{sub 4} (Pr{sub 6}Ni{sub 7}Si{sub 4}-type), CeNiSi (LaPtSi-type), CeNi{sub 0.8-0.3}Si{sub 1.2-1.7} (AlB{sub 2}-type), ~Ce{sub 2}Ni{sub 2}Si (unknown type structure), ~Ce{sub 4.5}Ni{sub 3.5}Si{sub 2} (unknown type structure), Ce{sub 15}Ni{sub 7}Si{sub 10} (Pr{sub 15}Ni{sub 7}Si{sub 10}-type), Ce{sub 5}Ni{sub 1.85}Si{sub 3} (Ce{sub 5}Ni{sub 1.85}Si{sub 3}-type), Ce{sub 6}Ni{sub 1.4}Si{sub 3.4} (Ce{sub 6}Ni{sub 1.67}Si{sub 3}-type), Ce{sub 7}Ni{sub 2}Si{sub 5} (Ce{sub 7}Ni{sub 2}Si{sub 5}-type) and Ce{sub 3}NiSi{sub 3} (Y{sub 3}NiSi{sub 3}-type) has been confirmed in this section. Moreover, the type structure has been determined for ~Ce{sub 2}Ni{sub 2}Si (Mo{sub 2}NiB{sub 2}-type Ce{sub 2}Ni{sub 2.5}Si{sub 0.5}) and ~Ce{sub 4.5}Ni{sub 3.5}Si{sub 2} (W{sub 3}CoB{sub 3}-type Ce{sub 3}Ni{sub 3-2.7}Si{sub 1-1.3}) and new ternary phases Ce{sub 2}Ni{sub 6.25}Si{sub 0.75} (Gd{sub 2}Co{sub 7}-type), CeNi{sub 7-7.6}Si{sub 6-5.4} (GdNi{sub 7}Si{sub 6}-type) and ~Ce{sub 27}Ni{sub 42}Si{sub 31} (unknown type structure) have been identified in this system. Quasi-binary phases, solid solutions, were detected at 870/1070 K for CeNi{sub 5}, CeNi{sub 3} and CeSi{sub 2}; while no appreciable solubility was observed for the other binary compounds of the Ce-Ni-Si system. As a prolongation of Rare Earth-Ni-Si system’s isostructural rows, LaNi{sub 7}Si{sub 6} and YNi{sub 6.6}Si{sub 6.1} (GdNi{sub 7}Si{sub 6}-type), ScNi{sub 6}Si{sub 6} (YCo{sub 6}Ge{sub 6}-type), NdNi{sub 6}Si{sub 6} (YNi{sub 6}Si{sub 6}-type), (Tb, Ho){sub 2}Ni{sub 15}Si{sub 2} (Th{sub 2}Zn{sub 17}-type), Nd{sub 2}Ni{sub 2.3}Si{sub 0.7} and Sm{sub 2}Ni{sub 2.2}Si{sub 0.8} (Mo{sub 2}NiB{sub 2}-type), Nd{sub 3}Ni{sub 2.55}Si{sub 1.45} (W{sub 3}CoB{sub 3}-type) and (Tb, Dy){sub 7}Ni{sub 50}Si{sub 19} (Y{sub 7}Ni{sub 49}Si{sub 20}-type) compounds were synthesized and investigated. Magnetic properties of the CeNi{sub 6}Si{sub 6}, CeNi{sub 7}Si{sub 6}, CeNi{sub 8.8}Si{sub 4.2}, Ce{sub 6}Ni{sub 7}Si{sub 4}, CeNi{sub 5}Si, Ce{sub 2}Ni{sub 2.5}Si{sub 0.5}, Nd{sub 2}Ni{sub 2.3}Si{sub 0.7} and Dy{sub 7}Ni{sub 50}Si{sub 19} compounds have also been investigated and are presented here. - Highlights: • Ce-Ni-Si isothermal section was obtained at 870/1070 K. • Twenty one known ternary cerium nickel silicides were confirmed in Ce-Ni-Si. • Five new cerium nickel silicides were detected in Ce-Ni-Si. • Eleven new rare earth nickel silicides were detected in R-Ni-Si. • Magnetic properties of eight rare earth nickel silicides were investigated.« less