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Title: Investigation of adsorption and absorption-induced stresses using microcantilever sensors

Abstract

The interaction between a vapor and a thin film adsorbed on one side of a bimaterial microcantilever produces differential stress, resulting in readily measurable curvatures of the cantilever structure. Depending upon the system studied, there exist two types of gas{endash}solid interaction: bulk-like absorption and surface-like adsorption. The absorption of hydrogen into palladium results in film expansion whose magnitude is governed by hydrogen partial pressure. The bending of a bimaterial microcantilever (palladium/silicon) due to hydrogen absorption depends on the thickness of the palladium film and is reversible but rate limited by a surface barrier. In contrast, the stress induced by adsorption of mercury onto a bimaterial (gold/silicon) cantilever is irreversible at room temperature, is rate limited by surface coverage, and is independent of the gold{endash}film thickness. {copyright} 2001 American Institute of Physics.

Authors:
; ;
Publication Date:
Sponsoring Org.:
(US)
OSTI Identifier:
40204388
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 90; Journal Issue: 1; Other Information: DOI: 10.1063/1.1378333; Othernumber: JAPIAU000090000001000427000001; 016114JAP; PBD: 1 Jul 2001; Journal ID: ISSN 0021-8979
Publisher:
The American Physical Society
Country of Publication:
United States
Language:
English
Subject:
08 HYDROGEN; ABSORPTION; ADSORPTION; BENDING; HYDROGEN; MERCURY; PALLADIUM; PARTIAL PRESSURE; STRESSES; THICKNESS; THIN FILMS

Citation Formats

Hu, Zhiyu, Thundat, T, and Warmack, R J. Investigation of adsorption and absorption-induced stresses using microcantilever sensors. United States: N. p., 2001. Web. doi:10.1063/1.1378333.
Hu, Zhiyu, Thundat, T, & Warmack, R J. Investigation of adsorption and absorption-induced stresses using microcantilever sensors. United States. doi:10.1063/1.1378333.
Hu, Zhiyu, Thundat, T, and Warmack, R J. Sun . "Investigation of adsorption and absorption-induced stresses using microcantilever sensors". United States. doi:10.1063/1.1378333.
@article{osti_40204388,
title = {Investigation of adsorption and absorption-induced stresses using microcantilever sensors},
author = {Hu, Zhiyu and Thundat, T and Warmack, R J},
abstractNote = {The interaction between a vapor and a thin film adsorbed on one side of a bimaterial microcantilever produces differential stress, resulting in readily measurable curvatures of the cantilever structure. Depending upon the system studied, there exist two types of gas{endash}solid interaction: bulk-like absorption and surface-like adsorption. The absorption of hydrogen into palladium results in film expansion whose magnitude is governed by hydrogen partial pressure. The bending of a bimaterial microcantilever (palladium/silicon) due to hydrogen absorption depends on the thickness of the palladium film and is reversible but rate limited by a surface barrier. In contrast, the stress induced by adsorption of mercury onto a bimaterial (gold/silicon) cantilever is irreversible at room temperature, is rate limited by surface coverage, and is independent of the gold{endash}film thickness. {copyright} 2001 American Institute of Physics.},
doi = {10.1063/1.1378333},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 1,
volume = 90,
place = {United States},
year = {2001},
month = {7}
}