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Title: Raman spectroscopy and x-ray diffraction studies of (Ti,Al)N films deposited by filtered cathodic vacuum arc at room temperature

Abstract

(Ti,Al)N films were deposited by an off-plane double bend filtered cathodic vacuum arc technique in N{sub 2} ambient at room temperature. X-ray diffraction (XRD) and Raman spectroscopy were used to characterize the film structure. The influence of deposition pressure and the substrate bias on the XRD patterns and Raman spectra were systematically studied. As deposition pressure is increased, the film structure evolves from metallic, to metal rich (Ti,Al){sub 2}N, and finally to a single face-centered cubic (Ti,Al)N. As substrate bias is increased, the structure evolves from amorphous to crystalline (Ti,Al)N for bias at 200 V. Further increase of substrate bias results in the decrease of the crystalline size and increase of disorder phase. Four peaks at 238, 326, 442, and 679 cm{minus}1, arisen from the transverse acoustic, longitudinal acoustic, transverse acoustic optical, and longitudinal acoustic modes of (Ti,Al)N phase, respectively, can be observed in the Raman spectra. The variation of the Raman spectra with the deposition pressure and substrate bias are in good agreement with that of the XRD measurements. {copyright} 2001 American Institute of Physics.

Authors:
; ; ;
Publication Date:
Sponsoring Org.:
(US)
OSTI Identifier:
40203740
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 89; Journal Issue: 11; Other Information: DOI: 10.1063/1.1352564; Othernumber: JAPIAU000089000011006192000001; 102107JAP; PBD: 1 Jun 2001; Journal ID: ISSN 0021-8979
Publisher:
The American Physical Society
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ACOUSTICS; DEPOSITION; PHYSICS; RAMAN SPECTRA; RAMAN SPECTROSCOPY; SUBSTRATES; X-RAY DIFFRACTION

Citation Formats

Cheng, Y H, Tay, B K, Lau, S P, and Shi, X. Raman spectroscopy and x-ray diffraction studies of (Ti,Al)N films deposited by filtered cathodic vacuum arc at room temperature. United States: N. p., 2001. Web. doi:10.1063/1.1352564.
Cheng, Y H, Tay, B K, Lau, S P, & Shi, X. Raman spectroscopy and x-ray diffraction studies of (Ti,Al)N films deposited by filtered cathodic vacuum arc at room temperature. United States. https://doi.org/10.1063/1.1352564
Cheng, Y H, Tay, B K, Lau, S P, and Shi, X. 2001. "Raman spectroscopy and x-ray diffraction studies of (Ti,Al)N films deposited by filtered cathodic vacuum arc at room temperature". United States. https://doi.org/10.1063/1.1352564.
@article{osti_40203740,
title = {Raman spectroscopy and x-ray diffraction studies of (Ti,Al)N films deposited by filtered cathodic vacuum arc at room temperature},
author = {Cheng, Y H and Tay, B K and Lau, S P and Shi, X},
abstractNote = {(Ti,Al)N films were deposited by an off-plane double bend filtered cathodic vacuum arc technique in N{sub 2} ambient at room temperature. X-ray diffraction (XRD) and Raman spectroscopy were used to characterize the film structure. The influence of deposition pressure and the substrate bias on the XRD patterns and Raman spectra were systematically studied. As deposition pressure is increased, the film structure evolves from metallic, to metal rich (Ti,Al){sub 2}N, and finally to a single face-centered cubic (Ti,Al)N. As substrate bias is increased, the structure evolves from amorphous to crystalline (Ti,Al)N for bias at 200 V. Further increase of substrate bias results in the decrease of the crystalline size and increase of disorder phase. Four peaks at 238, 326, 442, and 679 cm{minus}1, arisen from the transverse acoustic, longitudinal acoustic, transverse acoustic optical, and longitudinal acoustic modes of (Ti,Al)N phase, respectively, can be observed in the Raman spectra. The variation of the Raman spectra with the deposition pressure and substrate bias are in good agreement with that of the XRD measurements. {copyright} 2001 American Institute of Physics.},
doi = {10.1063/1.1352564},
url = {https://www.osti.gov/biblio/40203740}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 11,
volume = 89,
place = {United States},
year = {Fri Jun 01 00:00:00 EDT 2001},
month = {Fri Jun 01 00:00:00 EDT 2001}
}