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Title: Etching trenches to effectively create electron quantum wires for single-electron-transistor applications

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.1377315· OSTI ID:40203200

By self-consistently solving two-dimensional Schrodinger and Poisson equations, we have studied electron quantum wires formed by etching two shallow trenches in GaAs/InGaAs/AlGaAs and GaAs/AlGaAs heterostructures for single-electron-transistor applications. Two-dimensional electron gases (2DEGs) form in the InGaAs layer in GaAs/InGaAs/AlGaAs and at the GaAs/AlGaAs interface in GaAs/AlGaAs heterostructure, the two etched trenches deplete the carriers of the 2DEGs underneath and thus effectively define an electron quantum wire. It has been determined that two etched trenches with a depth of 50 nm and a spatial separation of 250 nm are optimal to create an electron quantum wire in a GaAs/InGaAs/AlGaAs heterostructure with a cross section of 80{times}10 nm{sup 2} and a peak electron concentration of 1.5{times}10{sup 18} cm{sup {minus}3} at 4.2 K. {copyright} 2001 American Institute of Physics.

Sponsoring Organization:
(US)
OSTI ID:
40203200
Journal Information:
Applied Physics Letters, Vol. 78, Issue 23; Other Information: DOI: 10.1063/1.1377315; Othernumber: APPLAB000078000023003705000001; 007123APL; PBD: 4 Jun 2001; ISSN 0003-6951
Publisher:
The American Physical Society
Country of Publication:
United States
Language:
English