Gettering of boron by an ion-implanted antimony layer in silicon
Journal Article
·
· Solid-State Electron., v. 18, no. 12, pp. 1131-1134
- Research Organization:
- Bell Telephone Labs., Inc., Allentown, PA
- NSA Number:
- NSA-33-026854
- OSTI ID:
- 4008421
- Journal Information:
- Solid-State Electron., v. 18, no. 12, pp. 1131-1134, Other Information: Orig. Receipt Date: 30-JUN-76
- Country of Publication:
- United Kingdom
- Language:
- English
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