Calibration and standards beamline 6.3.2 at the Advanced Light Source

Journal Article · Sun Sep 01 00:00:00 EDT 1996 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1147338· OSTI ID:389616

Underwood, J H; Gullikson, E M; Koike, M; Batson, P J; Denham, P E; Franck, K D; Tackaberry, R E; Steele, W F ^[1]

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1. Center for X-ray Optics, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720 (United States)

This bending magnet beamline has been in operation since February 1995 for the characterization of optical elements (mirrors, gratings, multilayers, detectors, etc.) in the energy range 50{endash}1000 eV. Although it was designed primarily for precision reflectometry of multilayer reflecting optics for EUV projection lithography, it has capabilities for a wide range of measurements. The optics consist of a monochromator, a reflectometer, and refocusing mirrors to provide a small spot on the sample. The monochromator is a very compact, entrance-slitless, varied-line-spacing plane-grating design in which the mechanically ruled grating operates in the converging light from a spherical mirror working at high demagnification. Aberrations of the mirror are corrected by the line spacing variation, so that the spectral resolving power {lambda}/{Delta}{lambda} is limited by the ALS source size to about 7000. Wavelength is scanned by simple rotation of the grating with a fixed exit slit. The reflectometer has the capability of positioning the sample to within 10 {mu}m and setting its angular position to 0.002{degree}. LABVIEW{sup T}{sup M} based software provides a convenient interface to the user. The reflectometer is separated from the beamline by a differential pump and can be pumped down in 1/2 hour. Auxiliary experimental stations can be mounted behind the reflectometer. Results are shown that demonstrate the performance and operational convenience of the beamline {copyright} {ital 1996 American Institute of Physics.}

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 389616
• Report Number(s): CONF-9510119-; ISSN 0034-6748; TRN: 96:028030
• Journal Information: Review of Scientific Instruments, Vol. 67, Issue 9; Conference: SRI `95: synchrotron radiation instrumentation symposium and the 7. users meeting for the advanced photon source (APS), Argonne, IL (United States), 16-20 Oct 1995; Other Information: PBD: Sep 1996
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
ADVANCED LIGHT SOURCE
BEAM TRANSPORT
OPTICAL SYSTEMS
CALIBRATION STANDARDS
BEAM BENDING MAGNETS
EV RANGE 10-100
EV RANGE 100-1000
DESIGN
EXTREME ULTRAVIOLET RADIATION
MONOCHROMATORS
MIRRORS
GRATINGS
REFLECTIVITY
PHOTON BEAMS
SYNCHROTRON RADIATION