A novel multilayer circuit process using YBa{sub 2}Cu{sub 3}O{sub {ital x}}/SrTiO{sub 3} thin films patterned by wet etching and ion milling

doi:https://doi.org/10.1063/1.117700

Title: A novel multilayer circuit process using YBa{sub 2}Cu{sub 3}O{sub {ital x}}/SrTiO{sub 3} thin films patterned by wet etching and ion milling

Full Record
Other Related Research

Abstract

A process combining hydrofluoric acid (HF) and Ar{sup +} ion milling has been used to make YBa{sub 2}Cu{sub 3}O{sub {ital x}}/SrTiO{sub 3}/YBa{sub 2}Cu{sub 3}O{sub {ital x}}(YBCO/STO/YBCO) multilayer test circuits. Low-angle steps can be readily etched in STO and YBCO films with this process. YBCO lines crossing 5{degree} steps have about the same critical temperature {ital T}{sub {ital c}} (89{endash}90 K) and critical current density {ital J}{sub {ital c}} ({approx_gt}1{times}10{sup 6} A/cm{sup 2} at 86 K) as lines on planar surfaces. Via connections have the same {ital T}{sub {ital c}} as other circuit components and adequate critical currents for most circuit designs. {copyright} {ital 1996 American Institute of Physics.}

Authors:

Li, H Q; Ono, R H; Vale, L R; Rudman, D A; Liou, S H ^[1]

National Institute of Standards and Technology, Boulder, Colorado 80303 (United States)

Publication Date:: 1996-10-01

Research Org.:: Purdue Univ., West Lafayette, IN (United States)

OSTI Identifier:: 388150

DOE Contract Number:: FG02-90ER45427

Resource Type:: Journal Article

Journal Name:: Applied Physics Letters

Additional Journal Information:: Journal Volume: 69; Journal Issue: 18; Other Information: PBD: Oct 1996

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 66 PHYSICS; HIGH-TC SUPERCONDUCTORS; INTEGRATED CIRCUITS; STRONTIUM OXIDES; THIN FILMS; YTTRIUM OXIDES; BARIUM OXIDES; COPPER OXIDES; STRONTIUM TITANATES; FABRICATION; CRITICAL CURRENT; JOSEPHSON JUNCTIONS; ION BEAMS; ETCHING; MULTILAYERS

Citation Formats


                    Li, H Q, Ono, R H, Vale, L R, Rudman, D A, and Liou, S H. A novel multilayer circuit process using YBa{sub 2}Cu{sub 3}O{sub {ital x}}/SrTiO{sub 3} thin films patterned by wet etching and ion milling.  United States: N. p., 1996. 
        Web.  doi:10.1063/1.117700.

Copy to clipboard


                    Li, H Q, Ono, R H, Vale, L R, Rudman, D A, & Liou, S H. A novel multilayer circuit process using YBa{sub 2}Cu{sub 3}O{sub {ital x}}/SrTiO{sub 3} thin films patterned by wet etching and ion milling.  United States.  https://doi.org/10.1063/1.117700

Copy to clipboard


                    Li, H Q, Ono, R H, Vale, L R, Rudman, D A, and Liou, S H. Tue .  
        "A novel multilayer circuit process using YBa{sub 2}Cu{sub 3}O{sub {ital x}}/SrTiO{sub 3} thin films patterned by wet etching and ion milling".  United States.  https://doi.org/10.1063/1.117700.

Copy to clipboard


                    
@article{osti_388150,

  title        = {A novel multilayer circuit process using YBa{sub 2}Cu{sub 3}O{sub {ital x}}/SrTiO{sub 3} thin films patterned by wet etching and ion milling},

  author       = {Li, H Q and Ono, R H and Vale, L R and Rudman, D A and Liou, S H},

  abstractNote = {A process combining hydrofluoric acid (HF) and Ar{sup +} ion milling has been used to make YBa{sub 2}Cu{sub 3}O{sub {ital x}}/SrTiO{sub 3}/YBa{sub 2}Cu{sub 3}O{sub {ital x}}(YBCO/STO/YBCO) multilayer test circuits. Low-angle steps can be readily etched in STO and YBCO films with this process. YBCO lines crossing 5{degree} steps have about the same critical temperature {ital T}{sub {ital c}} (89{endash}90 K) and critical current density {ital J}{sub {ital c}} ({approx_gt}1{times}10{sup 6} A/cm{sup 2} at 86 K) as lines on planar surfaces. Via connections have the same {ital T}{sub {ital c}} as other circuit components and adequate critical currents for most circuit designs. {copyright} {ital 1996 American Institute of Physics.}},

  doi          = {10.1063/1.117700},

  url          = {https://www.osti.gov/biblio/388150},
  journal      = {Applied Physics Letters},
number       = 18,

  volume       = 69,

  place        = {United States},

  year         = {1996},

  month        = {10}

}

Copy to clipboard

Journal Article:

https://doi.org/10.1063/1.117700

Other availability

Find in Google Scholar

Search WorldCat to find libraries that may hold this journal

Save / Share:

Export Metadata

Save to My Library

Similar records in OSTI.GOV collections:

Aspects of the SrO-CuO-TiO ₂ Ternary System Related to the Deposition of SrTiO ₃ and Copper-Doped SrTiO ₃ Thin-Film Buffer Layers

Thesis/Dissertation Ayala, Alicia

YBa ₂Cu ₃O _27-δ (YBCO) coated conductors are promising materials for large-scale superconductivity applications. One version of a YBCO coated conductor is based on ion beam assisted deposition (IBAD) of magnesium oxide (MgO) onto polycrystalline metal substrates. SrTiO ₃ (STO) is often deposited by physical vapor deposition (PVD) methods as a buffer layer between the YBCO and IBAD MgO due to its chemical stability and lattice mismatch of only ~1.5% with YBCO. In this work, some aspects of the stability of STO with respect to copper (Cu) and chemical solution deposition of STO on IBAD MgO templates were examined. Solubilitymore »« less
https://doi.org/10.2172/836697

Full Text Available
(YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}},Au)/SrTiO{sub 3}/LaAlO{sub 3} thin film conductor/ferroelectric coupled microstripline phase shifters for phased array applications

Journal Article Van Keuls, F W ; Romanofsky, R R ; Bohman, D Y ; ... - Applied Physics Letters

We report on the design, fabrication, and testing of novel YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}}/SrTiO{sub 3}/LaAlO{sub 3} (YBCO/STO/LAO) and Au/SrTiO{sub 3}/LaAlO{sub 3} (Au/STO/LAO) coupled microstrip line phase shifters (CMPS). These CMPS were tested at frequencies within the Ku and K bands (12{endash}20 GHz), at temperatures from 24 to 77 K, and at dc voltages (V{sub dc}) from zero to 350 V. A relative insertion phase shift ({Delta}{phi}) of 390{degree} was measured for an eight-element YBCO/STO/LAO CMPS at V{sub dc}=350V, 16 GHz, and 40 K. At 77 K, a {Delta}{phi}{approximately}260{degree} was obtained for the CMPS at the same bias and frequency. Bothmore »« less
https://doi.org/10.1063/1.120251
Study of Superconductivity in YBa{sub 2}Cu{sub 3}O{sub 7-x}/SrTiO{sub 3} Composites

Journal Article Tchabukiani, T. ; Daraselia, D. ; Japaridze, D. ; ... - Journal of Superconductivity and Novel Magnetism

Superconducting properties of YBa{sub 2}Cu{sub 3}O{sub 7-x} (YBCO)/SrTiO{sub 3} (STO) polycrystalline composites were investigated. The composites were obtained by rapid thermal processing of the 20% YBCO–80% STO mixtures in the air in the temperature range 700–1000 °C for 2 min. Magnetization measurements showed that the superconducting critical temperature (T{sub c}) is practically not changed if optimally doped YBCO is used in YBCO/STO composites. In contrast, a strong increase of T{sub c} from 65 to 90 K was found in the case of underdoped YBCO. This increase of T{sub c} can be explained by unusually fast diffusion of oxygen from STO to YBCO grainsmore »« less
https://doi.org/10.1007/S10948-019-5085-5
Electrically tunable coplanar transmission line resonators using YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}}/SrTiO{sub 3} bilayers

Journal Article Findikoglu, A T ; Jia, Q X ; Campbell, I H ; ... - Applied Physics Letters

We have prepared electrically tunable microwave resonators incorporating superconducting YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} (YBCO) and paraelectric SrTiO{sub 3} (STO) layers on LaAlO{sub 3} substrates. The top YBCO layer for each sample was patterned into a 8 mm long coplanar transmission line with a 40 {mu}m gap and a 20 {mu}m center line width. The microwave transmission through the coplanar transmission line exhibits resonances corresponding to standing microwaves along the coplanar transmission line. These resonances are modulated by applying a bias voltage between the center line and the ground planes. Samples with a 0.5 {mu}m thick (2 {mu}m thick) bottommore »« less
https://doi.org/10.1063/1.114137
Characterization of three-dimensional grain boundary topography in a YBa{sub 2}Cu{sub 3}O{sub 7{minus}d} thin film bicrystal grown on a SrTiO{sub 3} substrate

Journal Article Ayache, J ; Thorel, A ; Lesueur, J ; ... - Journal of Applied Physics

The topography and crystallography of YBa{sub 2}Cu{sub 3}O{sub 7{minus}d} (YBCO) bicrystal films grown epitaxially on oriented SrTiO{sub 3} (STO) bicrystals have been characterized by scanning and transmission electron microscopies (SEM and TEM) and atomic force microscopy (AFM). The YBCO films were formed by laser ablation on melt-grown {Sigma}13 STO bicrystals with a misorientation of 24{degree} around the {l_angle}001{r_angle} tilt axis. In agreement with previous reports, TEM analysis revealed that the grain boundary in the film did not always follow the planar substrate grain boundary faithfully, but undulated about the average boundary plane. High resolution electron microscopy observations of the apparentlymore »« less
https://doi.org/10.1063/1.368736

Similar Records