Experimental study of spatial distribution of Ar glow discharge plasma
- Gas Discharge and Plasma Laboratory, Department of Electrical Engineering, Tsinghua University, Beijing 100084, People`s Republic of (China)
The characteristics of the spatial distribution of Ar glow discharge plasma were experimentally investigated. By means of direct comparisons between theory and experiment, the effects of the variation of gap separation, gas pressure, and electrode radius on the spatial distributions of electron density and electric field were studied. Results indicate that the maximum electron density moves toward the cathode as the gap separation or gas pressure increases while variation of electrode radius produces little effect. Predictions from a theoretical model have been experimentally verified. General agreements between theory and experiment were found to be reasonably good except in the cathode region, where discrepancy exists. {copyright} {ital 1996 American Institute of Physics.}
- OSTI ID:
- 383800
- Journal Information:
- Physics of Plasmas, Vol. 3, Issue 10; Other Information: PBD: Oct 1996
- Country of Publication:
- United States
- Language:
- English
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