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Title: Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in-situ reflectometry

Abstract

Vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic vapor phase epitaxy. Excellent uniformity of Fabry-Perot cavity wavelength for VCSEL materials of {+-}0.2% across a 3-in diameter wafer was achieved. This results in excellent uniformity of the lasing wavelength and threshold current of VCSEL devices. Employing pregrowth calibrations on growth rates periodically with an in situ reflectometer, the authors obtained a run-to-run wavelength reproducibility for 770- and 850-nm VCSELs of {+-}0.3% over the course of more than a hundred runs.

Authors:
; ; ; ;  [1];  [2]
  1. Sandia National Labs., Albuquerque, NM (United States)
  2. Hewlett-Packard Co., San Jose, CA (United States)
Publication Date:
Research Org.:
Sandia National Laboratory
OSTI Identifier:
376051
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Journal Article
Journal Name:
IEEE Photonics Technology Letters
Additional Journal Information:
Journal Volume: 8; Journal Issue: 10; Other Information: PBD: Oct 1996
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; 36 MATERIALS SCIENCE; SEMICONDUCTOR LASERS; FABRICATION; PERFORMANCE; GALLIUM ARSENIDES; VAPOR PHASE EPITAXY; ALUMINIUM ARSENIDES; LASER MATERIALS; LASER RADIATION; CRYSTAL GROWTH

Citation Formats

Hou, H Q, Choquette, K D, Hammons, B E, Breiland, W G, Geib, K M, and Chui, H C. Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in-situ reflectometry. United States: N. p., 1996. Web. doi:10.1109/68.536629.
Hou, H Q, Choquette, K D, Hammons, B E, Breiland, W G, Geib, K M, & Chui, H C. Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in-situ reflectometry. United States. doi:10.1109/68.536629.
Hou, H Q, Choquette, K D, Hammons, B E, Breiland, W G, Geib, K M, and Chui, H C. Tue . "Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in-situ reflectometry". United States. doi:10.1109/68.536629.
@article{osti_376051,
title = {Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in-situ reflectometry},
author = {Hou, H Q and Choquette, K D and Hammons, B E and Breiland, W G and Geib, K M and Chui, H C},
abstractNote = {Vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic vapor phase epitaxy. Excellent uniformity of Fabry-Perot cavity wavelength for VCSEL materials of {+-}0.2% across a 3-in diameter wafer was achieved. This results in excellent uniformity of the lasing wavelength and threshold current of VCSEL devices. Employing pregrowth calibrations on growth rates periodically with an in situ reflectometer, the authors obtained a run-to-run wavelength reproducibility for 770- and 850-nm VCSELs of {+-}0.3% over the course of more than a hundred runs.},
doi = {10.1109/68.536629},
journal = {IEEE Photonics Technology Letters},
number = 10,
volume = 8,
place = {United States},
year = {1996},
month = {10}
}