Residual stress in ion implanted titanium nitride studied by parallel beam glancing incidence x-ray diffraction
- Martin Marietta, Denver, CO (United States)
- ISM Technologies, Inc., San Diego, CA (United States)
- Charles Univ., Prague (Czechoslovakia)
Ion implantation is known to increase the lifetime of cutting tools. Current theories are the increase in lifetime is caused by an increase in the residual stress, or by work hardening of the surface associated with the implantation. In this work the effect of ion implantation on the residual stress in titanium nitride coatings made by the standard industrial methods of chemical and physical vapor deposition (CVD and PVD) is studied. It is found in the as-received condition (unimplanted), the residual stress levels are near zero for CVD materials and highly compressive, of the order of 6 GPa, for PVD materials. Ion implantation has no effect on the residual stress in the coatings made by CVD. Nitrogen does increase the compressive residual stress by some 10% in the near surface regions of PVD coatings, while nickel-titanium dual metal ion implantation does not have any effect. It appears that the lifetime increase is not associated with residual stress effects.
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 369845
- Report Number(s):
- CONF-9408178-; ISSN 0376-0308; TRN: 96:004756-0048
- Journal Information:
- Advances in X-Ray Analysis, Vol. 38; Conference: 43. annual Denver x-ray conference on applications of x-ray analysis, Steamboat Spring, CO (United States), 1-5 Aug 1994; Other Information: PBD: 1995
- Country of Publication:
- United States
- Language:
- English
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