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Title: Morphological and compositional evolution of Pt-Si intermetallic thin films prepared by the activated adsorption of SiH{sub 4} on Pt(111)

Abstract

The authors have investigated using scanning tunneling microscopy (STM) and Auger electron spectroscopy (AES) the growth and structural evolution of Pt-Si intermetallic phases formed via a chemical vapor deposition (CVD) mediated process. The Pt silicide thin films were prepared though the exposure of a Pt(111) crystal to silane (SiH{sub 4}) followed by various annealing treatments. The deposition of Si via the decomposition of silane at room temperature preferentially forms clusters at step edges that avoid the centers of Pt terraces. The sizes and coverages of the clusters increases with silane exposure. The clusters are of intermetallic character (composed of both Si and Pt) and coarsen to give cluster heights much larger than a Pt(111) step height. These observations implicitly establish that Si interdiffusion in the near-surface region is weakly activated. Studies performed as a function of the silane exposure and annealing temperature reveal a complicated phase behavior that incorporates seven separate atomically ordered phases in addition to large-scale surface features such as three-dimensional islands. Growth and degradation mechanisms have been constructed, and the phenomena observed are contrasted with standard kinetic models based on sequential phase growth.

Authors:
; ;  [1]
  1. Univ. of Illinois, Urbana, IL (United States)
Publication Date:
Sponsoring Org.:
USDOE, Washington, DC (United States); Illinois Univ., Urbana, IL (United States); National Science Foundation, Washington, DC (United States)
OSTI Identifier:
347511
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Journal Article
Journal Name:
Journal of Physical Chemistry B: Materials, Surfaces, Interfaces, amp Biophysical
Additional Journal Information:
Journal Volume: 103; Journal Issue: 16; Other Information: PBD: 22 Apr 1999
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; PLATINUM SILICIDES; THIN FILMS; SILANES; SUBSTRATES; PLATINUM; ANNEALING; MICROSCOPY; AUGER ELECTRON SPECTROSCOPY

Citation Formats

Bondos, J C, Gewirth, A A, and Nuzzo, R G. Morphological and compositional evolution of Pt-Si intermetallic thin films prepared by the activated adsorption of SiH{sub 4} on Pt(111). United States: N. p., 1999. Web. doi:10.1021/jp9836170.
Bondos, J C, Gewirth, A A, & Nuzzo, R G. Morphological and compositional evolution of Pt-Si intermetallic thin films prepared by the activated adsorption of SiH{sub 4} on Pt(111). United States. https://doi.org/10.1021/jp9836170
Bondos, J C, Gewirth, A A, and Nuzzo, R G. 1999. "Morphological and compositional evolution of Pt-Si intermetallic thin films prepared by the activated adsorption of SiH{sub 4} on Pt(111)". United States. https://doi.org/10.1021/jp9836170.
@article{osti_347511,
title = {Morphological and compositional evolution of Pt-Si intermetallic thin films prepared by the activated adsorption of SiH{sub 4} on Pt(111)},
author = {Bondos, J C and Gewirth, A A and Nuzzo, R G},
abstractNote = {The authors have investigated using scanning tunneling microscopy (STM) and Auger electron spectroscopy (AES) the growth and structural evolution of Pt-Si intermetallic phases formed via a chemical vapor deposition (CVD) mediated process. The Pt silicide thin films were prepared though the exposure of a Pt(111) crystal to silane (SiH{sub 4}) followed by various annealing treatments. The deposition of Si via the decomposition of silane at room temperature preferentially forms clusters at step edges that avoid the centers of Pt terraces. The sizes and coverages of the clusters increases with silane exposure. The clusters are of intermetallic character (composed of both Si and Pt) and coarsen to give cluster heights much larger than a Pt(111) step height. These observations implicitly establish that Si interdiffusion in the near-surface region is weakly activated. Studies performed as a function of the silane exposure and annealing temperature reveal a complicated phase behavior that incorporates seven separate atomically ordered phases in addition to large-scale surface features such as three-dimensional islands. Growth and degradation mechanisms have been constructed, and the phenomena observed are contrasted with standard kinetic models based on sequential phase growth.},
doi = {10.1021/jp9836170},
url = {https://www.osti.gov/biblio/347511}, journal = {Journal of Physical Chemistry B: Materials, Surfaces, Interfaces, amp Biophysical},
number = 16,
volume = 103,
place = {United States},
year = {Thu Apr 22 00:00:00 EDT 1999},
month = {Thu Apr 22 00:00:00 EDT 1999}
}