Atmospheric pressure plasma jet applications
- Los Alamos National Lab., NM (United States)
The atmospheric pressure plasma jet (APPJ) is a non-thermal, high pressure plasma discharge that produces a high velocity effluent stream of highly reactive chemical species. The discharge operates on a feedstock gas (e.g., He/O2/H2O) which flows between two concentric cylindrical electrodes: an outer grounded electrode and an inner electrode powered at 13.56 MHz RF. While passing through the plasma, the feedgas becomes excited, ionized or dissociated by electron impact. The fast-flowing effluent consists of ions and electrons, which are rapidly lost by recombination, highly reactive radicals (e.g., O, OH), and metastable species (e.g., O2). The metastable O2, which is reactive to hydrocarbon and other organic species, has been observed through optical emission spectroscopy to decrease by a factor of 2 from the APPJ nozzle exit to a distance of 10 cm. Unreacted metastable O2, and that which does not impinge on a surface, will then decay back to ordinary ground state O2, resulting in a completely dry, environmentally-benign form of surface cleaning. Applications such as removal of photoresist, oxide films and organic residues from wafers for the electronics industry, decontamination of civilian and military areas and personnel exposed to chemical or biological warfare agents, and paint (e.g., graffiti) removal are being considered.
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- OSTI ID:
- 346892
- Report Number(s):
- CONF-980601-; TRN: IM9920%%109
- Resource Relation:
- Conference: 25. international conference on plasma science, Raleigh, NC (United States), 1-4 Jun 1998; Other Information: PBD: 1998; Related Information: Is Part Of IEEE conference record -- Abstracts. 1998 IEEE international conference on plasma science; PB: 343 p.
- Country of Publication:
- United States
- Language:
- English
Similar Records
Atmospheric pressure plasma for decontamination of chem/bio warfare agents
Atmospheric-pressure plasma jet