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Title: A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics

Abstract

This paper describes a three-axis accelerometer implemented in a surface-micromachining technology with integrated CMOS. The accelerometer measures changes in a capacitive half-bridge to detect deflections of a proof mass, which result from acceleration input. The half-bridge is connected to a fully differential position-sense interface, the output of which is used for one-bit force feedback. By enclosing the proof mass in a one-bit feedback loop, simultaneous force balancing and analog-to-digital conversion are achieved. On-chip digital offset-trim electronics enable compensation of random offset in the electronic interface. Analytical performance calculations are shown to accurately model device behavior. The fabricated single-chip accelerometer measures 4 {times} 4 mm{sup 2}, draws 27 mA from a 5-V supply, and has a dynamic range of 84, 81, and 70 dB along the x-, y-, and z-axes, respectively.

Authors:
;  [1]
  1. Univ. of California, Berkeley, CA (United States)
Publication Date:
Sponsoring Org.:
Sandia National Labs., Albuquerque, NM (United States); Defense Advanced Research Projects Agency, Arlington, VA (United States)
OSTI Identifier:
343674
Resource Type:
Journal Article
Journal Name:
IEEE Journal of Solid-State Circuits
Additional Journal Information:
Journal Volume: 34; Journal Issue: 4; Other Information: PBD: Apr 1999
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; ACCELEROMETERS; CALIBRATION; MEASURING METHODS; ANALOG-TO-DIGITAL CONVERTERS; PERFORMANCE; MINIATURIZATION

Citation Formats

Lemkin, M, and Boser, B E. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics. United States: N. p., 1999. Web. doi:10.1109/4.753678.
Lemkin, M, & Boser, B E. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics. United States. https://doi.org/10.1109/4.753678
Lemkin, M, and Boser, B E. 1999. "A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics". United States. https://doi.org/10.1109/4.753678.
@article{osti_343674,
title = {A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics},
author = {Lemkin, M and Boser, B E},
abstractNote = {This paper describes a three-axis accelerometer implemented in a surface-micromachining technology with integrated CMOS. The accelerometer measures changes in a capacitive half-bridge to detect deflections of a proof mass, which result from acceleration input. The half-bridge is connected to a fully differential position-sense interface, the output of which is used for one-bit force feedback. By enclosing the proof mass in a one-bit feedback loop, simultaneous force balancing and analog-to-digital conversion are achieved. On-chip digital offset-trim electronics enable compensation of random offset in the electronic interface. Analytical performance calculations are shown to accurately model device behavior. The fabricated single-chip accelerometer measures 4 {times} 4 mm{sup 2}, draws 27 mA from a 5-V supply, and has a dynamic range of 84, 81, and 70 dB along the x-, y-, and z-axes, respectively.},
doi = {10.1109/4.753678},
url = {https://www.osti.gov/biblio/343674}, journal = {IEEE Journal of Solid-State Circuits},
number = 4,
volume = 34,
place = {United States},
year = {Thu Apr 01 00:00:00 EST 1999},
month = {Thu Apr 01 00:00:00 EST 1999}
}