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Title: Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates

Abstract

Substrate effects on the measurement of thin film mechanical properties by nanoindentation methods have been studied experimentally using a model soft film on hard substrate system: aluminum on glass. The hardness and elastic modulus of aluminum films with thicknesses of 240, 650, and 1700 nm sputter-deposited on glass were systematically characterized as a function of indenter penetration depth using standard nanoindentation methods. Scanning electron and atomic force microscopy of the hardness impressions revealed that indentation pileup in the aluminum is significantly enhanced by the substrate. The substrate also affects the form of the unloading curve in a manner which has important implications for nanoindentation data analysis procedures. Because of these effects, nanoindentation measurement techniques overestimate the film hardness and elastic modulus by as much as 100{percent} and 50{percent}, respectively, depending on the indentation depth. The largest errors occur at depths approximately equal to the film thickness. {copyright} {ital 1999 Materials Research Society.}

Authors:
;  [1]
  1. Department of Materials Science, Rice University, 6100 Main Street, MS 321, Houston, Texas 77251-1892 (United States)
Publication Date:
Research Org.:
Oak Ridge Institute of Science and Education
OSTI Identifier:
321485
DOE Contract Number:  
AC05-76OR00033; AC05-96OR22464
Resource Type:
Journal Article
Journal Name:
Journal of Materials Research
Additional Journal Information:
Journal Volume: 14; Journal Issue: 1; Other Information: PBD: Jan 1999
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; THIN FILMS; ALUMINIUM; SUBSTRATES; GLASS; MECHANICAL TESTS; HARDNESS; ELASTICITY

Citation Formats

Tsui, T Y, and Pharr, G M. Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates. United States: N. p., 1999. Web. doi:10.1557/JMR.1999.0042.
Tsui, T Y, & Pharr, G M. Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates. United States. doi:10.1557/JMR.1999.0042.
Tsui, T Y, and Pharr, G M. Fri . "Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates". United States. doi:10.1557/JMR.1999.0042.
@article{osti_321485,
title = {Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates},
author = {Tsui, T Y and Pharr, G M},
abstractNote = {Substrate effects on the measurement of thin film mechanical properties by nanoindentation methods have been studied experimentally using a model soft film on hard substrate system: aluminum on glass. The hardness and elastic modulus of aluminum films with thicknesses of 240, 650, and 1700 nm sputter-deposited on glass were systematically characterized as a function of indenter penetration depth using standard nanoindentation methods. Scanning electron and atomic force microscopy of the hardness impressions revealed that indentation pileup in the aluminum is significantly enhanced by the substrate. The substrate also affects the form of the unloading curve in a manner which has important implications for nanoindentation data analysis procedures. Because of these effects, nanoindentation measurement techniques overestimate the film hardness and elastic modulus by as much as 100{percent} and 50{percent}, respectively, depending on the indentation depth. The largest errors occur at depths approximately equal to the film thickness. {copyright} {ital 1999 Materials Research Society.}},
doi = {10.1557/JMR.1999.0042},
journal = {Journal of Materials Research},
number = 1,
volume = 14,
place = {United States},
year = {1999},
month = {1}
}