Characterization of pulse-modulated inductively-coupled discharges in argon and chlorine

Hebner, G A; Fledderman, C B

Title: Characterization of pulse-modulated inductively-coupled discharges in argon and chlorine

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Abstract

The characteristics of pulse modulated inductively coupled plasmas in argon and chlorine have been experimentally investigated. Measurements were performed for peak rf powers between 150 and 400 W, duty cycles between 10 and 90%, pulse repetition frequencies between 3 and 20 kHz, and argon or chlorine gas. Over this parameter space, measurements were performed of the forward and reflected rf power into the matching network, coil voltage, rf variation of the plasma potential using a capacitive probe, electron density using a microwave interferometer, and Cl{sup {minus}} density using laser photodetachment spectroscopy. These measurements indicate that for the first 50--100 rf cycles of each rf pulse, the discharge may be operating in a capacitive discharge mode with rf variations in the plasma potential of several hundreds of volts and relatively low electron density. Measurements of the electron density in pulse modulated chlorine discharges indicate that the steady state electron density is a function of the duty cycle; the steady state electron density is lower for higher duty cycles. This may indicate that the ratio of Cl to Cl{sub 2} is changing with duty cycle. As a result, the dominate ions and neutrals that strike and etch the surface are also changing.more »« less

Authors:

Hebner, G A; Fledderman, C B ^[1]

Sandia National Labs., Albuquerque, NM (United States)

Publication Date:: Wed Dec 31 00:00:00 EST 1997

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

Sponsoring Org.:: USDOE, Washington, DC (United States)

OSTI Identifier:: 321047

Report Number(s):: CONF-970559-
Journal ID: ISSN 0730-9244; TRN: IM9910%%238

DOE Contract Number:: AC04-94AL85000

Resource Type:: Conference

Resource Relation:: Conference: 24. IEEE international conference on plasma science, San Diego, CA (United States), 19-23 May 1997; Other Information: PBD: 1997; Related Information: Is Part Of IEEE conference record -- Abstracts; PB: 354 p.

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; ELECTRIC DISCHARGES; ARGON; CHLORINE; PLASMA DIAGNOSTICS; ION DENSITY; ELECTRON DENSITY; ETCHING; SEMICONDUCTOR MATERIALS; ELECTRON TEMPERATURE

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                    Hebner, G A, and Fledderman, C B. Characterization of pulse-modulated inductively-coupled discharges in argon and chlorine.  United States: N. p., 1997. 
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                    Hebner, G A, & Fledderman, C B. Characterization of pulse-modulated inductively-coupled discharges in argon and chlorine.  United States.

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                    Hebner, G A, and Fledderman, C B. 1997.  
        "Characterization of pulse-modulated inductively-coupled discharges in argon and chlorine".  United States.

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@article{osti_321047,

  title        = {Characterization of pulse-modulated inductively-coupled discharges in argon and chlorine},

  author       = {Hebner, G A and Fledderman, C B},

  abstractNote = {The characteristics of pulse modulated inductively coupled plasmas in argon and chlorine have been experimentally investigated. Measurements were performed for peak rf powers between 150 and 400 W, duty cycles between 10 and 90%, pulse repetition frequencies between 3 and 20 kHz, and argon or chlorine gas. Over this parameter space, measurements were performed of the forward and reflected rf power into the matching network, coil voltage, rf variation of the plasma potential using a capacitive probe, electron density using a microwave interferometer, and Cl{sup {minus}} density using laser photodetachment spectroscopy. These measurements indicate that for the first 50--100 rf cycles of each rf pulse, the discharge may be operating in a capacitive discharge mode with rf variations in the plasma potential of several hundreds of volts and relatively low electron density. Measurements of the electron density in pulse modulated chlorine discharges indicate that the steady state electron density is a function of the duty cycle; the steady state electron density is lower for higher duty cycles. This may indicate that the ratio of Cl to Cl{sub 2} is changing with duty cycle. As a result, the dominate ions and neutrals that strike and etch the surface are also changing. In addition, a microwave radiometer was used to provide an indication of the time dependent electron temperature. Large spikes in the microwave radiation temperature were noted at the turn on of the rf power and in some cases at the transition from a capacitively coupled to an inductively coupled plasma.},

  doi          = {},

  url          = {https://www.osti.gov/biblio/321047},
  journal      = {},

  issn         = {0730-9244},

  number       = ,

  volume       = ,

  place        = {United States},

  year         = {Wed Dec 31 00:00:00 EST 1997},

  month        = {Wed Dec 31 00:00:00 EST 1997}

}

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