Microstructural aspects and mechanism of the {ital C}49-to-{ital C}54 polymorphic transformation in titanium disilicide
- Department of Materials Science and Engineering and Coordinated Science Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)
- Microelectronic Products Division, AT&T Global Information Solutions, Colorado Springs, Colorado 80916 (United States)
Microstructural study of the {ital C}49--TiSi{sub 2} to {ital C}54--TiSi{sub 2} polymorphic transformation has been performed to elucidate microstructural evolution and possible mechanism of the phase transformation. It has been shown that the nucleation of the {ital C}54--TiSi{sub 2} is heterogeneous, and preferentially takes place at triple grain junctions or grain boundaries. The interphase interfaces between {ital C}49 and {ital C}54 disilicides are often ragged with incoherent characteristics. The growth of the {ital C}54 phase is found to proceed by advancing the highly mobile incoherent interfaces in all directions toward the heavily faulted {ital C}49 phase. No rigorous orientation relationships are found between the two phases. The microstructural features of the transformation bear some massive characteristics.
- OSTI ID:
- 29263
- Journal Information:
- Journal of Applied Physics, Vol. 77, Issue 9; Other Information: PBD: 1 May 1995
- Country of Publication:
- United States
- Language:
- English
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