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Title: Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers

Abstract

It is well known that bimetallic microcantilevers can exhibit static deflection as a result of thermal effects, including exothermic adsorption of chemicals on their surfaces. It is shown here that the resonance frequency of a cantilever can change due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending that is induced by differential surface stress. The magnitude of these effects depends upon the chemical properties of the surface and upon the amount of material adsorbed. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemical sensors.

Authors:
; ; ;  [1]
  1. Health Sciences Research Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6123 (United States)
Publication Date:
Research Org.:
Oak Ridge Y-12 Plant
OSTI Identifier:
29252
DOE Contract Number:  
AC05-84OS21400
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 77; Journal Issue: 8; Other Information: PBD: 15 Apr 1995
Country of Publication:
United States
Language:
English
Subject:
44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; MECHANICAL VIBRATIONS; ADSORPTION; STRESSES; SURFACES; RESONANCE; FREQUENCY DEPENDENCE; BIMETALS; TEMPERATURE DEPENDENCE; CHEMICAL ANALYSIS

Citation Formats

Chen, G Y, Thundat, T, Wachter, E A, and Warmack, R J. Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers. United States: N. p., 1995. Web. doi:10.1063/1.359562.
Chen, G Y, Thundat, T, Wachter, E A, & Warmack, R J. Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers. United States. https://doi.org/10.1063/1.359562
Chen, G Y, Thundat, T, Wachter, E A, and Warmack, R J. Sat . "Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers". United States. https://doi.org/10.1063/1.359562.
@article{osti_29252,
title = {Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers},
author = {Chen, G Y and Thundat, T and Wachter, E A and Warmack, R J},
abstractNote = {It is well known that bimetallic microcantilevers can exhibit static deflection as a result of thermal effects, including exothermic adsorption of chemicals on their surfaces. It is shown here that the resonance frequency of a cantilever can change due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending that is induced by differential surface stress. The magnitude of these effects depends upon the chemical properties of the surface and upon the amount of material adsorbed. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemical sensors.},
doi = {10.1063/1.359562},
url = {https://www.osti.gov/biblio/29252}, journal = {Journal of Applied Physics},
number = 8,
volume = 77,
place = {United States},
year = {1995},
month = {4}
}