skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Synthesis of mullite coatings by chemical vapor deposition

Abstract

Formation of mullite on ceramic substrates via chemical vapor deposition was investigated. Mullite is a solid solution of Al{sub 2}O{sub 3} and SiO{sub 2} with a composition of 3Al{sub 2}O{sub 3}{center_dot}2SiO{sub 2}. Thermodynamic calculations performed on the AlCl{sub 3}{endash}SiCl{sub 4}{endash}CO{sub 2}{endash}H{sub 2} system were used to construct equilibrium chemical vapor deposition (CVD) phase diagrams. With the aid of these diagrams and consideration of kinetic rate limiting factors, initial process parameters were determined. Through process optimization, crystalline CVD mullite coatings have been successfully grown on SiC and Si{sub 3}N{sub 4} substrates. Results from the thermodynamic analysis, process optimization, and effect of various process parameters on deposition rate and coating morphology are discussed. {copyright} {ital 1996 Materials Research Society.}

Authors:
;  [1]
  1. Department of Manufacturing Engineering, Boston University, Boston, Massachusetts 02215 (United States)
Publication Date:
OSTI Identifier:
285858
Resource Type:
Journal Article
Journal Name:
Journal of Materials Research
Additional Journal Information:
Journal Volume: 11; Journal Issue: 6; Other Information: PBD: Jun 1996
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; SILICON CARBIDES; SURFACE COATING; SILICON NITRIDES; MULLITE; CHEMICAL VAPOR DEPOSITION; CERAMICS; CHEMICAL REACTION KINETICS; PHASE DIAGRAMS; THERMODYNAMIC PROPERTIES

Citation Formats

Mulpuri, R P, and Sarin, V K. Synthesis of mullite coatings by chemical vapor deposition. United States: N. p., 1996. Web. doi:10.1557/JMR.1996.0166.
Mulpuri, R P, & Sarin, V K. Synthesis of mullite coatings by chemical vapor deposition. United States. https://doi.org/10.1557/JMR.1996.0166
Mulpuri, R P, and Sarin, V K. 1996. "Synthesis of mullite coatings by chemical vapor deposition". United States. https://doi.org/10.1557/JMR.1996.0166.
@article{osti_285858,
title = {Synthesis of mullite coatings by chemical vapor deposition},
author = {Mulpuri, R P and Sarin, V K},
abstractNote = {Formation of mullite on ceramic substrates via chemical vapor deposition was investigated. Mullite is a solid solution of Al{sub 2}O{sub 3} and SiO{sub 2} with a composition of 3Al{sub 2}O{sub 3}{center_dot}2SiO{sub 2}. Thermodynamic calculations performed on the AlCl{sub 3}{endash}SiCl{sub 4}{endash}CO{sub 2}{endash}H{sub 2} system were used to construct equilibrium chemical vapor deposition (CVD) phase diagrams. With the aid of these diagrams and consideration of kinetic rate limiting factors, initial process parameters were determined. Through process optimization, crystalline CVD mullite coatings have been successfully grown on SiC and Si{sub 3}N{sub 4} substrates. Results from the thermodynamic analysis, process optimization, and effect of various process parameters on deposition rate and coating morphology are discussed. {copyright} {ital 1996 Materials Research Society.}},
doi = {10.1557/JMR.1996.0166},
url = {https://www.osti.gov/biblio/285858}, journal = {Journal of Materials Research},
number = 6,
volume = 11,
place = {United States},
year = {Sat Jun 01 00:00:00 EDT 1996},
month = {Sat Jun 01 00:00:00 EDT 1996}
}