Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae

Riley, M E

doi:10.2172/274143

Title: Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae

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Abstract

A previously-developed approximation to the first integral of the Poisson equation enables one to obtain solutions for the voltage- current characteristics of a radio-frequency (rf) plasma sheath that are valid over the whole range of inertial response of the ions to an imposed rf voltage or current-specified conditions. The theory reproduced the time-dependent voltage-current characteristics of the two extreme cases corresponding to the Lieberman rf sheath theory and the Metze-Ernie-Oskam theory. In this paper the sheath model is connected to the plasma bulk description, and a prescription is given for the ion relaxation time constant, which determines the time-dependent ion impact energy on the electrode surface. It appears that this connected model should be applicable to those high density, low pressure plasmas in which the Debye length is a small fraction of the ion mean free path, which itself is a small fraction of the plasma dimension.

Authors:: Riley, M E

Publication Date:: Thu Aug 01 00:00:00 EDT 1996

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE, Washington, DC (United States)

OSTI Identifier:: 274143

Report Number(s):: SAND-96-1948
ON: DE96014005

DOE Contract Number:: AC04-94AL85000

Resource Type:: Technical Report

Resource Relation:: Other Information: PBD: Aug 1996

Country of Publication:: United States

Language:: English

Subject:: 70 PLASMA PHYSICS AND FUSION; PLASMA SHEATH; MATHEMATICAL MODELS; PLASMA; PLASMA DENSITY; LANGMUIR FREQUENCY; ION DENSITY; RADIOWAVE RADIATION; KHZ RANGE 100-1000

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                    Riley, M E. Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae.  United States: N. p., 1996. 
        Web.  doi:10.2172/274143.

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                    Riley, M E. Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae.  United States.  https://doi.org/10.2172/274143

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                    Riley, M E. 1996.  
        "Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae".  United States.  https://doi.org/10.2172/274143.  https://www.osti.gov/servlets/purl/274143.

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@article{osti_274143,

  title        = {Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae},

  author       = {Riley, M E},

  abstractNote = {A previously-developed approximation to the first integral of the Poisson equation enables one to obtain solutions for the voltage- current characteristics of a radio-frequency (rf) plasma sheath that are valid over the whole range of inertial response of the ions to an imposed rf voltage or current-specified conditions. The theory reproduced the time-dependent voltage-current characteristics of the two extreme cases corresponding to the Lieberman rf sheath theory and the Metze-Ernie-Oskam theory. In this paper the sheath model is connected to the plasma bulk description, and a prescription is given for the ion relaxation time constant, which determines the time-dependent ion impact energy on the electrode surface. It appears that this connected model should be applicable to those high density, low pressure plasmas in which the Debye length is a small fraction of the ion mean free path, which itself is a small fraction of the plasma dimension.},

  doi          = {10.2172/274143},

  url          = {https://www.osti.gov/biblio/274143},
  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Thu Aug 01 00:00:00 EDT 1996},

  month        = {Thu Aug 01 00:00:00 EDT 1996}

}

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