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Title: Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae

Abstract

A previously-developed approximation to the first integral of the Poisson equation enables one to obtain solutions for the voltage- current characteristics of a radio-frequency (rf) plasma sheath that are valid over the whole range of inertial response of the ions to an imposed rf voltage or current-specified conditions. The theory reproduced the time-dependent voltage-current characteristics of the two extreme cases corresponding to the Lieberman rf sheath theory and the Metze-Ernie-Oskam theory. In this paper the sheath model is connected to the plasma bulk description, and a prescription is given for the ion relaxation time constant, which determines the time-dependent ion impact energy on the electrode surface. It appears that this connected model should be applicable to those high density, low pressure plasmas in which the Debye length is a small fraction of the ion mean free path, which itself is a small fraction of the plasma dimension.

Authors:
Publication Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
274143
Report Number(s):
SAND-96-1948
ON: DE96014005
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Technical Report
Resource Relation:
Other Information: PBD: Aug 1996
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION; PLASMA SHEATH; MATHEMATICAL MODELS; PLASMA; PLASMA DENSITY; LANGMUIR FREQUENCY; ION DENSITY; RADIOWAVE RADIATION; KHZ RANGE 100-1000

Citation Formats

Riley, M.E. Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae. United States: N. p., 1996. Web. doi:10.2172/274143.
Riley, M.E. Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae. United States. doi:10.2172/274143.
Riley, M.E. Thu . "Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae". United States. doi:10.2172/274143. https://www.osti.gov/servlets/purl/274143.
@article{osti_274143,
title = {Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae},
author = {Riley, M.E.},
abstractNote = {A previously-developed approximation to the first integral of the Poisson equation enables one to obtain solutions for the voltage- current characteristics of a radio-frequency (rf) plasma sheath that are valid over the whole range of inertial response of the ions to an imposed rf voltage or current-specified conditions. The theory reproduced the time-dependent voltage-current characteristics of the two extreme cases corresponding to the Lieberman rf sheath theory and the Metze-Ernie-Oskam theory. In this paper the sheath model is connected to the plasma bulk description, and a prescription is given for the ion relaxation time constant, which determines the time-dependent ion impact energy on the electrode surface. It appears that this connected model should be applicable to those high density, low pressure plasmas in which the Debye length is a small fraction of the ion mean free path, which itself is a small fraction of the plasma dimension.},
doi = {10.2172/274143},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Aug 01 00:00:00 EDT 1996},
month = {Thu Aug 01 00:00:00 EDT 1996}
}

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