RF magnetron sputter-deposition of La{sub 0.5}CoO{sub 3}//Pt composite electrodes for Pb(Zr,Ti)O{sub 3} thin film capacitors
- Sandia National Labs., Albuquerque, NM (United States)
- Radiant Technologies, Albuquerque, NM (United States)
La{sub 0.5}Sr{sub 0.5}CoO{sub 3} (LSCO) thin films have been deposited using RF magnetron sputter-deposition for use as an electrode material for PZT (PbZrTiO{sub 3}) thin film capacitors. Effect of O{sub 2}:Ar sputter gas ratio during deposition, on LSCO film properties was studied. It was found that the resistivity of the LSCO films deposited at ambient temperature decreases as the O{sub 2}: Ar ratio was increased for both as-deposited and annealed films. It was also found that thin overlayers of LSCO tend to stabilize the underlying Pt//Ti electrode structure during subsequent thermal processing. The LSCO//Pt//Ti composite electrode stack has a low resistivity and provides excellent fatigue performance for PZT capacitors. Furthermore, the LSCO//Pt//Ti electrode sheet resistance does not degrade with annealing temperature and the electrode does not display hillock formation. Possible mechanisms for the stabilization of the Pt//Ti electrode with LSCO overlayers are discussed.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- Defense Advanced Research Projects Agency, Arlington, VA (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 253368
- Report Number(s):
- SAND-96-1478C; CONF-960401-58; ON: DE96011699
- Resource Relation:
- Conference: Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 8-12 Apr 1996; Other Information: PBD: [1996]
- Country of Publication:
- United States
- Language:
- English
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