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Robust Data-Driven Predictive Run-to-Run Control for Automated Serial Sectioning

Journal Article · · IEEE Control Systems Letters
 [1];  [2];  [2];  [3]
  1. Univ. of New Mexico, Albuquerque, NM (United States); Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
  2. Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
  3. Univ. of New Mexico, Albuquerque, NM (United States)

This letter presents a one-step predictive run-to-run controller (R2R-MPC) for the automation of mechanical serial sectioning (MSS), a destructive material analysis process. To address the inherent uncertainty and disturbances in the MSS process, a robust closed-loop approach is presented. Here, the robust R2R-MPC models the uncertainty of the MSS process using a linear differential inclusion. As an analytical model of the MSS process is unavailable, the differential inclusion is identified from historical data. The R2R-MPC is posed as an optimization problem that computes incremental changes to the control input which minimize the worst-case material removal errors. This optimization-based controller is combined with a run-to-run controller to provide integral action that rejects constant disturbances and tracks constant reference removal rates. To demonstrate the efficacy of our robust R2R-MPC, we present simulation results which compare the presented controller with a conventional non-robust R2R.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
NA0003525
OSTI ID:
2498463
Report Number(s):
SAND--2025-00056J
Journal Information:
IEEE Control Systems Letters, Journal Name: IEEE Control Systems Letters Vol. 8; ISSN 2475-1456
Publisher:
IEEECopyright Statement
Country of Publication:
United States
Language:
English

References (16)

Review on model predictive control: an engineering perspective journal August 2021
A Framework for Closed-Loop Optimization of an Automated Mechanical Serial-Sectioning System via Run-to-Run Control as Applied to a Robo-Met.3D journal June 2022
A model-based predictive control approach to repetitive control of continuous processes with periodic operations journal April 2001
Run-to-run control of batch production process in manufacturing systems based on online measurement journal March 2020
Serial sectioning in the SEM for three dimensional materials science journal April 2020
Development of general multivariable run-by-run control methods with application to a sheet metal forming process journal April 2008
A survey of run-to-run control for batch processes journal December 2018
Survey on iterative learning control, repetitive control, and run-to-run control journal December 2009
Quantitative serial sectioning analysis journal March 2001
Artificial neural network model-based run-to-run process controller journal January 1996
A comparison of run-to-run control algorithms conference January 2002
Constrained Run-to-Run Control for Precision Serial Sectioning conference August 2022
Synthesis of ILC–MPC Controller With Data-Driven Approach for Constrained Batch Processes journal April 2020
Survey on Run-to-Run Control Algorithms in High-Mix Semiconductor Manufacturing Processes journal December 2015
Reduction of Depth Variation in an Si Etching Process by Applying an Optimized Run-to-Run Control System journal November 2005
EWMA run-to-run controllers with gain updating: Stability and sensitivity analysis conference June 2008

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