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Robust Data-Driven Predictive Run-to-Run Control for Automated Serial Sectioning

Journal Article · · IEEE Control Systems Letters
 [1];  [2];  [2];  [3]
  1. Univ. of New Mexico, Albuquerque, NM (United States); Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
  2. Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
  3. Univ. of New Mexico, Albuquerque, NM (United States)

This letter presents a one-step predictive run-to-run controller (R2R-MPC) for the automation of mechanical serial sectioning (MSS), a destructive material analysis process. To address the inherent uncertainty and disturbances in the MSS process, a robust closed-loop approach is presented. Here, the robust R2R-MPC models the uncertainty of the MSS process using a linear differential inclusion. As an analytical model of the MSS process is unavailable, the differential inclusion is identified from historical data. The R2R-MPC is posed as an optimization problem that computes incremental changes to the control input which minimize the worst-case material removal errors. This optimization-based controller is combined with a run-to-run controller to provide integral action that rejects constant disturbances and tracks constant reference removal rates. To demonstrate the efficacy of our robust R2R-MPC, we present simulation results which compare the presented controller with a conventional non-robust R2R.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
NA0003525
OSTI ID:
2498463
Report Number(s):
SAND-2025-00056J
Journal Information:
IEEE Control Systems Letters, Vol. 8; ISSN 2475-1456
Publisher:
IEEECopyright Statement
Country of Publication:
United States
Language:
English

References (16)

Quantitative serial sectioning analysis journal March 2001
Serial sectioning in the SEM for three dimensional materials science journal April 2020
Run-to-run control of batch production process in manufacturing systems based on online measurement journal March 2020
Survey on Run-to-Run Control Algorithms in High-Mix Semiconductor Manufacturing Processes journal December 2015
A comparison of run-to-run control algorithms conference January 2002
Survey on iterative learning control, repetitive control, and run-to-run control journal December 2009
Reduction of Depth Variation in an Si Etching Process by Applying an Optimized Run-to-Run Control System journal November 2005
Development of general multivariable run-by-run control methods with application to a sheet metal forming process journal April 2008
A survey of run-to-run control for batch processes journal December 2018
EWMA run-to-run controllers with gain updating: Stability and sensitivity analysis conference June 2008
Artificial neural network model-based run-to-run process controller journal January 1996
Constrained Run-to-Run Control for Precision Serial Sectioning conference August 2022
A Framework for Closed-Loop Optimization of an Automated Mechanical Serial-Sectioning System via Run-to-Run Control as Applied to a Robo-Met.3D journal June 2022
A model-based predictive control approach to repetitive control of continuous processes with periodic operations journal April 2001
Synthesis of ILC–MPC Controller With Data-Driven Approach for Constrained Batch Processes journal April 2020
Review on model predictive control: an engineering perspective journal August 2021

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