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Anisotropic electrical properties of NiO x /β-Ga 2 O 3 p-n heterojunctions on (2̅01), (001), and (010) crystal orientations

Journal Article · · Applied Physics Express
Abstract

NiOx/β-Ga2O3p-nheterojunctions fabricated on ( 2̅ 01), (001), and (010) β-Ga2O3substrates show distinctly anisotropic electrical properties. All three devices exhibited excellent rectification ≥109, and turn-on voltages >2.0 V. The (010) device showed very different turn-on voltage, specific on-resistance, and reverse recovery time compared with ( 2̅ 01) and (001) devices. Moreover, it is calculated that the interface trap state densities for ( 2̅ 01), (001), and (010) plane devices are 4.3 × 1010, 7.4 × 1010, and 1.6 × 1011eV–1cm–2, respectively. These differences in the NiOx/β-Ga2O3heterojunctions are attributed to the different atomic configurations, the density of dangling bonds, and interface trap state densities.

Research Organization:
Arizona State Univ., Tempe, AZ (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
DOE Contract Number:
SC0021230
OSTI ID:
2421819
Journal Information:
Applied Physics Express, Journal Name: Applied Physics Express Journal Issue: 9 Vol. 16; ISSN 1882-0778
Publisher:
Japan Society of Applied Physics
Country of Publication:
United States
Language:
English

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