Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride

Nejadriahi, Hani; Gaur, Prabhav; Johnson, Karl; Pappert, Steve; Fainman, Yeshaiahu; Yu, Paul

doi:10.1364/ol.476819

Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride

Journal Article · 01 January 2023 · Optics Letters

DOI:https://doi.org/10.1364/ol.476819· OSTI ID:2421090

^[1]; ; ; Pappert, Steve; Fainman, Yeshaiahu;

OSTI

The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index (n = 3.1) silicon-rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115° at a fixed wavelength of 1525 nm. A beam width of 6.3° has been measured at boresight, consistent with theory. We demonstrate SRN as a viable material choice for chip-scale OPA applications due to its high thermo-optic coefficient, high optical power handling capacity [negligible two-photon absorption (TPA)], wide transparency window, and CMOS compatibility.

Research Organization:: Univ. of California, San Diego, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

DOE Contract Number:: SC0019273

OSTI ID:: 2421090

Journal Information:: Optics Letters, Journal Name: Optics Letters Journal Issue: 3 Vol. 48; ISSN OPLEDP; ISSN 0146-9592

Publisher:: Optical Society of America (OSA)

Country of Publication:: United States

Language:: English

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