Machine Straightness Error Measurement Based on Optical Fiber Fabry–Pérot Interferometer Monitoring Technique

Fu, Xingyu; Zhou, Fengfeng; Yun, Huitaek; Kim, Eunseob; Chen, Siying; Jun, Martin Byung-Guk

doi:10.1115/1.4055897

Machine Straightness Error Measurement Based on Optical Fiber Fabry–Pérot Interferometer Monitoring Technique

Journal Article · 18 October 2022 · Journal of Manufacturing Science and Engineering

DOI:https://doi.org/10.1115/1.4055897· OSTI ID:2418520

Fu, Xingyu ^[1]; Zhou, Fengfeng; Yun, Huitaek; Kim, Eunseob; Chen, Siying; Jun, Martin Byung-Guk

OSTI

Abstract

In this research, we propose an Error Separation Technique (EST) based on optical fiber sensors for on-machine straightness error measurement. Two fiber optic Fabry–Pérot interferometers have been developed serving as two displacement sensors. The displacement distance is computed according to the reflected spectrum from interferometers, which can achieve a sub-micrometer resolution. The two-point method has been employed to separate the straightness error of the slides and the profile error of a fine-polished standard block. The spacing distance between two interferometers is determined by the diameter of optical fibers so that the EST's resolution has the potential to reach the sub-millimeter scale. In the experiment, the straightness error has been measured on a commercially available computer numerical control machine tool, and the measurement has been conducted on its x-axis. The spacing distance between two optical fiber sensors is 1.5 mm which equals the EST's resolution along the machine tool's x-axis. The separated profile error of the measured standard block is around 30 µm which has been verified by a high precision Coordinate Measurement Machine (CMM). The magnitude of the separated straightness error is around 40 µm. This technique is flexible and simple to be conducted, which can contribute to the micro-machine tool calibration and other straightness error applications.

Research Organization:: Univ. of California, Los Angeles, CA (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE)

DOE Contract Number:: EE0007613

OSTI ID:: 2418520

Journal Information:: Journal of Manufacturing Science and Engineering, Journal Name: Journal of Manufacturing Science and Engineering Journal Issue: 1 Vol. 145; ISSN 1087-1357

Publisher:: ASME

Country of Publication:: United States

Language:: English

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