Recovering the efficiency of AlGaInP red micro-LEDs using sidewall treatments

Wong, Matthew S.; White, Ryan C.; Gee, Stephen; Tak, Tanay; Gandrothula, Srinivas; Choi, Hyoshik; Nakamura, Shuji; Speck, James S.; DenBaars, Steven P.

doi:10.35848/1882-0786/acdf3c

Recovering the efficiency of AlGaInP red micro-LEDs using sidewall treatments

Journal Article · 01 June 2023 · Applied Physics Express

DOI:https://doi.org/10.35848/1882-0786/acdf3c· OSTI ID:2418097

^[1]; ; ; ; ; Choi, Hyoshik; ; Speck, James S.;

OSTI

Abstract

A sidewall treatment process is proposed to recover the external quantum efficiency (EQE) loss in AlGaInP micro-LEDs (μLEDs). The proposed sidewall treatment consists of thermal annealing, ammonium sulfide chemical treatment, and sidewall passivation using atomic-layer deposition (ALD). The devices with sidewall treatment show improved optical power of more than 500% and 190% at 5 and 100 A cm⁻², respectively, compared to devices with ALD sidewall passivation. The reduction in EQE was 20% when shrinking the device dimensions from 100 × 100 to 20 × 20μm². This work reveals that AlGaInPμLEDs can be energy efficient by employing proper sidewall treatments.

Research Organization:: Univ. of California, Santa Barbara, CA (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE)

DOE Contract Number:: EE0009691;

OSTI ID:: 2418097

Journal Information:: Applied Physics Express, Journal Name: Applied Physics Express Journal Issue: 6 Vol. 16; ISSN 1882-0778

Publisher:: Japan Society of Applied Physics

Country of Publication:: United States

Language:: English

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